Krzysztof R. Gajewski
at Wroclaw Univ of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 July 2013 Paper
Waldemar Oleszkiewicz, Wojciech Kijaszek, Jacek Gryglewicz, Adrian Zakrzewski, Krzysztof Gajewski, Daniel Kopiec, Paulina Kamyczek, Ewa Popko, Marek Tłaczała
Proceedings Volume 8902, 89022H (2013) https://doi.org/10.1117/12.2031066
KEYWORDS: Deposition processes, Raman spectroscopy, Plasma enhanced chemical vapor deposition, Refractive index, Carbon, Hydrogen, Plasma, Atomic force microscopy, Spectroscopic ellipsometry, Atmospheric plasma

Proceedings Article | 25 July 2013 Paper
Proceedings Volume 8902, 89020G (2013) https://doi.org/10.1117/12.2030886
KEYWORDS: Graphene, Nanostructures, Photomasks, Photoresist materials, Microfabrication, Silicon, Chemical vapor deposition, Silica, Computer aided design, Lithography

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