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Kuninori Nishizawa
at Nihon Synopsys GK
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Publications (1)
Proceedings Article | 12 November 2024 Presentation + Paper
CATS SmartFracture: a new fracture engine for curvilinear and multigon mask data input
Kokoro Kato, Satoshi Mitsuno, Kuninori Nishizawa, Ken Kuo, Johnny Yeap, J. Jou
Proceedings Volume 13216, 132161L (2024) https://doi.org/10.1117/12.3034562
KEYWORDS: Computed tomography, Optical proximity correction, Semiconductor manufacturing, Mathematical optimization, Manufacturing, Data processing, Standards development, Semiconductors, Semiconducting wafers, Photomasks
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