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Kuo-Chun Tseng
at National Tsing Hua Univ
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Publications (1)
Proceedings Article | 14 March 2016 Paper
WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device
Kuo-Chun Tseng, Chien-Chung Fu, Te-Hsun Lin, Shuo-Ting Hong, Tzu-Han Chuang
Proceedings Volume 9759, 97591E (2016) https://doi.org/10.1117/12.2211917
KEYWORDS: Microelectromechanical systems, Sensors, Lithography, Optical testing, Light sources, Mirrors, Laser systems engineering, System integration, Polarizers, Infrared sensors, Signal detection, Aluminum, Sensing systems
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