Kurt R. Kimmel
Technology Business Dev Mgr
SPIE Involvement:
Author
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Publications (22)

Proceedings Article | 27 May 2009 Paper
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Optical lithography, Etching, Scanners, Error analysis, Inspection, Photomasks, Extreme ultraviolet, Mask making, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Metrology, Scanners, Manufacturing, Inspection, Printing, Wafer inspection, Photomasks, Critical dimension metrology, Semiconducting wafers, Defect inspection

Proceedings Article | 26 March 2008 Paper
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Etching, Metals, Scanners, Photomasks, Extreme ultraviolet, Transistors, Extreme ultraviolet lithography, Optical proximity correction, Photoresist processing, Semiconducting wafers

Proceedings Article | 15 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Microscopes, Reticles, Contamination, Manufacturing, Reflectivity, Image resolution, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Polymers, Image processing, Scanners, Particles, Materials processing, Photoresist materials, Immersion lithography, Photoresist processing, Semiconducting wafers

Showing 5 of 22 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 17 December 2003

SPIE Conference Volume | 27 December 2002

Conference Committee Involvement (13)
Optical Microlithography XXIII
23 February 2010 | San Jose, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
Optical Microlithography XXII
24 February 2009 | San Jose, California, United States
Photomask Technology
7 October 2008 | Monterey, California, United States
Optical Microlithography XXI
26 February 2008 | San Jose, California, United States
Showing 5 of 13 Conference Committees
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