Dr. Lahsen Assoufid Profile

Dr. Lahsen Assoufid

Senior Physicist/Optics Group Leader at Argonne National Lab

SPIE Involvement:

Conference Program Committee | Editor | Author

Publications (55)

Proceedings Article | 14 September 2020 Presentation + Paper

Machine learning control of an elliptically bent hard X-ray mirror

Sheikh Mashrafi, Ross Harder, Xianbo Shi, Deming Shu, Zhi Qiao, Max Wyman, Tim Mooney, Jayson Anton, Steven Kearney, Luca Rebuffi, Jun Qian, Bing Shi, Lahsen Assoufid

Proc. SPIE. 11491, Advances in X-Ray/EUV Optics and Components XV

KEYWORDS: Mirrors, Hard x-rays, Machine learning, Control systems, Sensors, Profilometers, Feedback control, In situ metrology, Adaptive optics, Control systems design

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Proceedings Article | 4 September 2020 Presentation + Paper

Single-shot speckle tracking method based on wavelet transform and multi-resolution analysis

Zhi Qiao, Xianbo Shi, Lahsen Assoufid

Proc. SPIE. 11492, Advances in Metrology for X-Ray and EUV Optics IX

KEYWORDS: Speckle, Wavelet transforms, X-rays, Wavelets, Image processing, X-ray imaging, Wavefront sensors, Time metrology, Speckle pattern

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Proceedings Article | 22 August 2020 Poster + Paper

Prototype design and experimental tests of a zoom mirror system for the APS upgrade

Xianbo Shi, Zhi Qiao, Sheikh Mashrafi, Ross Harder, Deming Shu, Max Wyman, Jayson Anton, Steven Kearney, Luca Rebuffi, Tim Mooney, Jun Qian, Bing Shi, Satoshi Matsuyama, Kazuto Yamauchi, Lahsen Assoufid

Proc. SPIE. 11491, Advances in X-Ray/EUV Optics and Components XV

KEYWORDS: Mirrors, Wavefronts, Zoom lenses, Electrodes, Prototyping, Sensors, Adaptive optics, Wavefront sensors, Deformable mirrors

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Proceedings Article | 21 August 2020 Presentation

Adaptive x-ray zoom condenser system based on concave and convex mirrors

Yuka Nishioka, Hiroyuki Yamaguchi, Satoshi Matsuyama, Juniki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proc. SPIE. 11491, Advances in X-Ray/EUV Optics and Components XV

KEYWORDS: Mirrors, X-rays, Zoom lenses, X-ray optics, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 21 August 2020 Presentation + Paper

A software package named MOI is developed for calculating the mutual optical intensity propagation through beamline

Yong Wang, Xiangyu Meng, Xianbo Shi, Junchao Ren, Lahsen Assoufid, Renzhong Tai

Proc. SPIE. 11493, Advances in Computational Methods for X-Ray Optics V

KEYWORDS: Mirrors, Wave propagation, Coherence (optics), X-rays, Optical simulations, Optical components, X-ray optics

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Proceedings Article | 9 September 2019 Presentation

Laser microfabrication and metrology of diamond phase correctors for x-rays (Conference Presentation)

Sergey Antipov, Sergey Kuzikov, Xianbo Shi, Walan Grizolli, Lahsen Assoufid

Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV

KEYWORDS: X-rays, Metrology, Diamond, X-ray optics, Laser metrology, Microfabrication, Optics manufacturing, X-ray technology, Optical design, Mirrors

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Proceedings Article | 9 September 2019 Presentation

X-ray optics simulation: requirements, development, and integration (Conference Presentation)

Xianbo Shi, Luca Rebuffi, Ruben Reininger, Lahsen Assoufid

Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV

KEYWORDS: X-ray optics, Optical simulations, Software development, Optical components, Computer simulations, X-ray sources, X-rays, Synchrotrons, Optical design, Wave propagation

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The planning and construction of new and upgraded x-ray synchrotron light sources and free-electron lasers [1], in the last decade, has urged the need for advanced x-ray optics and promoted a rapid development of advanced software tools and packages for X-ray optics simulation and design. The focus of this development has evolved from individual optical components to start-to-end simulation packages (such as SRW [2]) integrating the computation of the source, optical elements, samples and the detection system. To take full advantage of the new sources, modern x-ray optical systems become more complex including e.g., adaptive optics whose performance heavily relies on the level of perfection of their mechanical, thermal and control systems. This successively demands the development of new simulation framework and software (such as OASYS [3]) to allow interoperability between different tools and physical models. A successful approach to the modern optical design requires not only the ability to integrate multiple optical components, but also the integration of different levels of simulation [4] including analytical formulas, numerical ray-tracing or wavefront propagation, and mutual coherence propagation. These simulations need to take into account the integration of the optical, mechanical and thermal properties of the system, as well as the prediction of the instrumental response at the experimental station to evaluate the overall quality of the optical layout or setup. Simulations could also be used to drive real control systems, by reverse processing of real-time data to interpolate the feedback signals. In this presentation, we will review the status of x-ray optics simulation with examples, and highlight future directions. [1] Eriksson, M., Van Der Veen, J. F., & Quitmann, C. J. Synchrotron Rad., 21, 837 (2014). [2] Chubar, O., Rakitin, M. S., Chen-Wiegart, Y.-C., Fluerasu, A., & Wiegart, L. Proc. SPIE, 10388, 1038811 (2017). [3] Rebuffi, L., & Sanchez del Rio, M. Proc. SPIE, 10388, 103880S (2017). [4] Shi, X., Reininger, R., Harder, R., & Haeffner, D. Proc. SPIE, 10388, 103880C (2017).

Proceedings Article | 9 September 2019 Presentation + Paper

High-speed characterization of refractive lenses with single-grating interferometry

Xianbo Shi, Walan Grizolli, Deming Shu, Luca Rebuffi, Zahirul Islam, Lahsen Assoufid

Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII

KEYWORDS: Lenses, Interferometry, Near field optics, Data analysis, Wavefronts, Metrology, X-ray optics, Data acquisition, X-rays, Beryllium

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Proceedings Article | 9 September 2019 Presentation

Status of the diamond CRL development

Sergey Antipov, Walan Grizolli, Xianbo Shi, Lahsen Assoufid

Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV

KEYWORDS: Diamond, X-rays, Free electron lasers, Light sources, X-ray diffraction, X-ray optics, Optical components, Laser cutting, Polishing, Surface roughness

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Proceedings Article | 9 September 2019 Presentation

Design and development of novel high-resolution monochromators and analyzers for inelastic x-ray scattering and other applications at APS (Conference Presentation)

XianRong Huang, Thomas Gog, Jungho Kim, Ayman Said, Lahsen Assoufid

Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV

KEYWORDS: Monochromators, X-rays, Scattering, Quartz, Light scattering, Sapphire, Crystals, Crystal optics, Silicon, Absorption

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Proceedings Article | 9 September 2019 Presentation + Paper

Collaborative development of diffraction-limited beamline optical systems at US DOE light sources

Kenneth Goldberg, Antoine Wojdyla, Diane Bryant, Weilun Chao, Daniele Cocco, Corey Hardin, Daniel Morton, May Ling Ng, Lance Lee, Lahsen Assoufid, Walan Grizolli, Xianbo Shi, Steve Kearney, Michael Wojcik, Yuri Shvyd'ko, Deming Shu, Mourad Idir, Lei Huang

Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII

KEYWORDS: Mirrors, Wavefronts, Wavefront sensors, Sensors, X-rays, Optical alignment, Monochromatic aberrations, Hard x-rays, Diffraction, Crystals, Adaptive optics

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Proceedings Article | 30 August 2019 Presentation + Paper

Finite element modeling of a laminar flexure bending mechanism for elliptically bent hard x-ray mirror

Jayson W. J. Anton, Deming Shu, Steven Kearney, Ross Harder, Xianbo Shi, Tim Mooney, Sheikh Mashrafi, Jun Qian, Bing Shi, Lahsen Assoufid

Proc. SPIE. 11100, Optomechanical Engineering 2019

KEYWORDS: Mirrors, Finite element methods, Sensors, Hard x-rays, Silicon, X-ray optics, X-rays, Actuators

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Proceedings Article | 17 September 2018 Presentation + Paper

Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors

Antoine Wojdyla, Diane Bryant, Weilun Chao, Lahsen Assoufid, Daniele Cocco, Mourad Idir, Kenneth Goldberg

Proc. SPIE. 10760, Advances in X-Ray/EUV Optics and Components XIII

KEYWORDS: Wavefronts, Wavefront sensors, Sensors, X-rays, Cameras, Interferometry, Diffraction, Scintillators, Calibration, Diffraction gratings

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Proceedings Article | 19 September 2017 Presentation

Mutual optical intensity propagation through non-ideal optics (Conference Presentation)

Xiangyu Meng, Xianbo Shi, Yong Wang, Ruben Reininger, Lahsen Assoufid, Renzhong Tai

Proc. SPIE. 10388, Advances in Computational Methods for X-Ray Optics IV

KEYWORDS: Mirrors, Wave propagation, Wavefronts, Coherence (optics), Spatial frequencies, Beam propagation method, Optical simulations, Phase shifts, Error analysis, Testing and analysis

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Proceedings Article | 7 September 2017 Presentation + Paper

Metrology of variable-line-spacing x-ray gratings using the APS Long Trace Profiler

Janet Sheung, Jun Qian, Joseph Sullivan, Muriel Thomasset, Jonathan Manton, Sunil Bean, Peter Takacs, Joseph Dvorak, Lahsen Assoufid

Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII

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Proceedings Article | 7 September 2017 Paper

Single-grating Talbot imaging for wavefront sensing and x-ray metrology

Walan Grizolli, Xianbo Shi, Tomasz Kolodziej, Yuri Shvyd'ko, Lahsen Assoufid

Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII

KEYWORDS: Metrology, X-rays, Wavefront sensors, Interferometry, Wavefronts, X-ray imaging, Interferometers, Near field, Speckle, Phase contrast

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Proceedings Article | 29 August 2017 Presentation + Paper

Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

Melville Ulmer, Rocco Coppejans, David Buchholz, Jian Cao, Xiaoli Wang, Alejandro Mercado, Jun Qian, Lahsen Assoufid, Allison O'Donnell, Kyle Condron, Benjamin Harpt

Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII

KEYWORDS: Silicon, Mirrors, Magnetism, X-ray optics, X-ray astronomy, Telescopes

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Proceedings Article | 23 August 2017 Paper

Strain-free polished channel-cut crystal monochromators: a new approach and results

Elina Kasman, Jonathan Montgomery, XianRong Huang, Jason Lerch, Lahsen Assoufid

Proc. SPIE. 10387, Advances in Laboratory-based X-Ray Sources, Optics, and Applications VI

KEYWORDS: Polishing, Crystals, Surface finishing, Monochromators, Laser crystals, Abrasives, Chemical mechanical planarization, Prototyping, Aluminum, Head

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Proceedings Article | 2 November 2016 Presentation

EPICS-based control and data acquisition for the APS slope profiler (Conference Presentation)

Joseph Sullivan, Lahsen Assoufid, Jun Qian, Peter Jemian, Tim Mooney, Mark Rivers, Kurt Goetze, Ronald Sluiter, Keenan Lang

Proc. SPIE. 9962, Advances in Metrology for X-Ray and EUV Optics VI

KEYWORDS: Mirrors, Data acquisition, Control systems, X-rays, Motion measurement, Control systems design, Motion controllers, Motion analysis, Experimental physics, Optical instrument design

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Proceedings Article | 25 October 2016 Paper

How to specify super-smooth mirrors: simulation studies on nano-focusing and wavefront preserving x-ray mirrors for next-generation light sources

Xianbo Shi, Lahsen Assoufid, Ruben Reininger

Proc. SPIE. 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics

KEYWORDS: Mirrors, X-rays, Light sources, Optical simulations, Metrology, Error analysis, Spatial frequencies, Diffraction, Optics manufacturing, Numerical simulations

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Proceedings Article | 9 September 2016 Presentation + Paper

Shaping Si, NiCo, and glass substrates via stresses in the coatings

Xiaoli Wang, Youwei Yao, Shi Ye, Tianchen Liu, Lahsen Assoufid, Jian Cao, M. Ulmer

Proc. SPIE. 9965, Adaptive X-Ray Optics IV

KEYWORDS: Silicon, Optical coatings, Glasses, Magnetism, X-ray optics, Mirrors, X-ray astronomy, X-rays, Thin film coatings, X-ray telescopes

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Proceedings Article | 17 September 2014 Paper

Development of single grating x-ray Talbot interferometer as a feedback loop sensor element of an adaptive x-ray mirror system

Shashidhara Marathe, Xianbo Shi, Ali Khounsary, Michael Wojcik, Naresh Kujala, Albert Macrander, Lahsen Assoufid

Proc. SPIE. 9208, Adaptive X-Ray Optics III

KEYWORDS: Mirrors, Actuators, X-rays, Interferometers, Wavefronts, Sensors, Deformable mirrors, X-ray optics, Phase interferometry, X-ray technology

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Proceedings Article | 5 September 2014 Paper

APS deposition facility upgrades and future plans

Ray Conley, Bing Shi, Mark Erdmann, Scott Izzo, Lahsen Assoufid, Kurt Goetze, Tim Mooney, Kenneth Lauer

Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX

KEYWORDS: Multilayers, Mirrors, Coating, Ions, Sputter deposition, Metrology, Ion beams, X-ray optics, Servomechanisms, Monochromators

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Proceedings Article | 5 September 2014 Paper

Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration

D. Shu, J. Qian, W. Liu, S. Kearney, J. Anton, J. Sullivan, L. Assoufid

Proc. SPIE. 9206, Advances in Metrology for X-Ray and EUV Optics V

KEYWORDS: Mirrors, 3D modeling, Ferroelectric materials, Calibration, Prototyping, X-rays, Interferometers, Crystals, X-ray optics, Actuators

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Proceedings Article | 5 September 2014 Paper

X-ray optics simulation and beamline design using a hybrid method: diffraction-limited focusing mirrors

Xianbo Shi, Ruben Reininger, Manuel Sánchez del Río, Jun Qian, Lahsen Assoufid

Proc. SPIE. 9209, Advances in Computational Methods for X-Ray Optics III

KEYWORDS: Mirrors, Optical simulations, Diffraction, Spatial frequencies, X-ray optics, Linear filtering, Wavefronts, Wave propagation, Near field, Optical components

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Proceedings Article | 5 September 2014 Paper

In-situ stress study on WSi2/Si multilayers

Bing Shi, Albert Macrander, Jörg Maser, Raymond Conley, Lahsen Assoufid

Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX

KEYWORDS: Multilayers, Silicon, Thin films, Molybdenum, Sputter deposition, Hard x-rays, X-ray optics, Lenses, Thin film devices, Interfaces

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Proceedings Article | 18 September 2013 Paper

Optomechanical design of a modular K-B mirror mount system for x-ray microfocusing at the advanced photon source

D. Shu, R. Harder, J. Almer, N. Kujala, S. Kearney, J. Anton, W. Liu, B. Lai, J. Maser, L. Finney, B. Shi, J. Qian, S. Marathe, A. Macrander, J. Tischler, S. Vogt, L. Assoufid

Proc. SPIE. 8836, Optomechanical Engineering 2013

KEYWORDS: Mirror mounts, Mirrors, X-rays, 3D modeling, Hard x-rays, X-ray optics, Optomechanical design, Prototyping, Synchrotron radiation, Optical testing

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Proceedings Article | 15 October 2012 Paper

Development of grating-based hard x-ray Talbot interferometry for optics and beam wavefront characterization at the advanced photon source

Shashidhara Marathe, Michael Wojcik, Naresh Kujala, Albert Macrander, Han Wen, Chian Liu, Kamel Fezzaa, Ralu Divan, Derrick Mancini, Lahsen Assoufid

Proc. SPIE. 8501, Advances in Metrology for X-Ray and EUV Optics IV

KEYWORDS: X-rays, Wavefronts, X-ray optics, Interferometry, Mirrors, Interferometers, Hard x-rays, Charge-coupled devices, X-ray imaging, Image transmission

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Proceedings Article | 15 October 2012 Paper

Achieving optimal flatness and surface roughness properties for novel x-ray optic structures formed by dicing saws

Michael Wieczorek, Ruben Khachatryan, Yuri Shvyd'ko, Robert Smith, Kenichi Iwasaki, Suzanne Miller, Jun Qian, Xianrong Huang, Lahsen Assoufid

Proc. SPIE. 8502, Advances in X-Ray/EUV Optics and Components VII

KEYWORDS: Nickel, Crystals, Diamond, X-ray optics, Surface finishing, Surface roughness, Synchrotron radiation, Manufacturing, Silicon, Spindles

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Proceedings Article | 28 September 2011 Paper

The effect of surface residual stress on the performance of high quality x-ray mirrors

J. Maj, G. Navrotski, X. Huang, L. Assoufid, R. Khachatryan, J. Qian, M. Wieczorek

Proc. SPIE. 8139, Advances in X-Ray/EUV Optics and Components VI

KEYWORDS: Mirrors, X-rays, Reflectivity, Crystals, Surface finishing, Surface roughness, X-ray optics, Polishing, Silicon, X-ray characterization

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Proceedings Article | 28 September 2011 Paper

Nested KB mirror fabrication for synchrotron hard x-ray nanofocusing

Bing Shi, Wenjun Liu, Jun Qian, Chian Liu, Ruben Khachatryan, Michael Wieczorek, Ali Khounsary, Albert Macrander, Paul Zschack, Jonathan Tischler, Gene Ice, Lahsen Assoufid

Proc. SPIE. 8139, Advances in X-Ray/EUV Optics and Components VI

KEYWORDS: Mirrors, Coating, Polishing, Surface finishing, Hard x-rays, X-rays, Synchrotrons, Platinum, Surface roughness, X-ray optics

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Proceedings Article | 4 May 2011 Paper

Multilayer-coated micro-grating array for x-ray phase-contrast imaging

Susanna Lynch, Chian Liu, Lahsen Assoufid, Nicole Morgan, Dumitru Mazilu, Eric Bennett, Camille Kemble, Han Wen

Proc. SPIE. 8076, EUV and X-Ray Optics: Synergy between Laboratory and Space II

KEYWORDS: Diffraction gratings, Multilayers, X-rays, Silicon, Semiconducting wafers, Diffraction, X-ray imaging, Interferometers, Refraction, Sensors

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Proceedings Article | 27 August 2010 Paper

Surface profile measurement of KB mirrors using Fizeau laser interferometer

J. Qian, L. Assoufid, C. Liu, B. Shi, W. Liu

Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III

KEYWORDS: Mirrors, Coating, X-rays, Interferometers, Fizeau interferometers, Fabrication, Metrology, Synchrotron radiation, Interferometry, Optical testing

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Proceedings Article | 27 August 2010 Paper

Platinum Kirkpatrik-Baez mirrors for a hard x-ray microfocusing system made by profile coating

Bing Shi, Chian Liu, Jun Qian, Wenjun Liu, Lahsen Assoufid, Ali Khounsary, Raymond Conley, Albert Macrander

Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V

KEYWORDS: Mirrors, Coating, Platinum, X-ray optics, Silicon, Metrology, Spherical lenses, X-rays, Hard x-rays, Sputter deposition

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Proceedings Article | 1 October 2007 Paper

A microstitching interferometer for evaluating the surface profile of precisely figured x-ray K-B mirrors

Lahsen Assoufid, Jun Qian, Cameron Kewish, Chian Liu, Ray Conley, Albert Macrander, Delvin Lindley, Christopher Saxer

Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II

KEYWORDS: Mirrors, Interferometers, Objectives, Microscopes, X-rays, Hard x-rays, Interferometry, X-ray optics, Metrology, Coating

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Proceedings Article | 27 September 2007 Paper

Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors

A. Rommeveaux, L. Assoufid, H. Ohashi, H. Mimura, K. Yamauchi, J. Qian, T. Ishikawa, C. Morawe, A. Macrander, A. Khounsary, S. Goto

Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II

KEYWORDS: Mirrors, Spherical lenses, Metrology, X-rays, Error analysis, Silicon, Silicon carbide, Interferometry, Optical components, Sensors

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Proceedings Article | 20 September 2007 Paper

Comparison of slope and height profiles for flat synchrotron x-ray mirrors measured with a long trace profiler and a PMI Fizeau interferometer

Jun Qian, Lahsen Assoufid, Albert Macrander

Proc. SPIE. 6704, Advances in Metrology for X-Ray and EUV Optics II

KEYWORDS: Mirrors, Interferometers, Silicon, Fizeau interferometers, Zerodur, X-rays, Error analysis, Grazing incidence, Synchrotrons, Metrology

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Proceedings Article | 17 September 2005 Paper

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, Shunji Goto

Proc. SPIE. 5921, Advances in Metrology for X-Ray and EUV Optics

KEYWORDS: Mirrors, Silicon, Metrology, Data conversion, Error analysis, Sensors, X-rays, Fourier transforms, Optical metrology, Synchrotron radiation

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Proceedings Article | 18 August 2005 Paper

Uncertainties in aspheric profile measurements with the geometry measuring machine at NIST

Ulf Griesmann, Nadia Machkour-Deshayes, Johannes Soons, Byoung Kim, Quandou Wang, John Stoup, Lahsen Assoufid

Proc. SPIE. 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II

KEYWORDS: Sensors, Interferometers, Mirrors, Calibration, Aspheric lenses, Interferometry, Beam splitters, Imaging systems, Metrology, Spherical lenses

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Proceedings Article | 18 October 2004 Paper

Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system

Curt Preissner, Lahsen Assoufid, Deming Shu

Proc. SPIE. 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II

KEYWORDS: Interferometers, Optical isolators, Mirrors, X-ray optics, X-rays, Vibrometry, Motion measurement, Modal analysis, Metrology, Signal attenuation

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Proceedings Article | 13 January 2004 Paper

Recoating mirrors having a chromium underlayer

Ali Khounsary, Peter Eng, Lahsen Assoufid, Albert Macrander, Jun Qian

Proc. SPIE. 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications

KEYWORDS: Mirrors, Etching, Optical coatings, Chromium, X-rays, Silicon, Zerodur, Glasses, Multilayers, Visualization

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Proceedings Article | 29 December 2003 Paper

At the limit of nondispersive micro- and nanofocusing mirror optics

Gene Ice, Eliot Specht, Jonathan Tischler, Ali Khounsary, Lahsen Assoufid, Chian Liu

Proc. SPIE. 5347, Micromachining Technology for Micro-Optics and Nano-Optics II

KEYWORDS: Mirrors, X-rays, Diffraction, Surface finishing, Hard x-rays, Polishing, Coating, X-ray optics, Particles, X-ray diffraction

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SPIE Journal Paper | 1 December 2003

Profile coating and its application for Kirkpatrick-Baez mirrors

Chian Liu, Lahsen Assoufid, Ray Conley, Albert Macrander, Gene Ice, Jonathan Tischler

OE Vol. 42 Issue 12

KEYWORDS: Mirrors, Coating, Gold, X-rays, Silicon, Polishing, Surface finishing, Metrology, Optical engineering, Spherical lenses

Proceedings Article | 24 December 2002 Paper

Profile coating of KB mirror applications at the Advanced Photon Source

Chian Liu, L. Assoufid, Albert Macrander, Gene Ice, J. Tischler

Proc. SPIE. 4782, X-Ray Mirrors, Crystals, and Multilayers II

KEYWORDS: Mirrors, Coating, Gold, X-rays, Silicon, Photomasks, Polishing, Metrology, X-ray optics, Semiconducting wafers

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For microfocusing x-ray mirrors, an ellipse shape is desirable for aberration-free optics. However, it is difficult to polish elliptical mirrors to x-ray quality smoothness. A differential coating method to convert a cylindrical mirror to an elliptical one has been previously reported The differential coating was obtained by varying the sputter source power while the mirror was passed through. Here we report a new method of profile coating to achieve the same goal more effectively. In the profile coating, the sputter source power is kept constant, while the substrate is passed over a contoured mask at a constant speed. The mask is placed very close to the substrate level (within 1.0 mm) on a shield-can over the sputter gun. Four-inch-diameter Si wafers were coated through a 100-mm-long by 152-mm-wide aperture on the top of the shield-can. The thickness distribution was then obtained using a spectroscopic ellipsometer with computer-controlled X-Y translation stages. A model has been developed to fit the measured thickness distribution of stationary growth. The relative thickness weightings are then digitized at every point 1 mm apart for the entire open area of the aperture. When the substrate is moving across the shield-can during a deposition, the film thickness is directly proportional to the length of the opening on the can along the moving direction. By equating the summation of relative weighting to the required relative thickness at the same position, the length of the opening at that position can be determined. By repeating the same process for the whole length of the required profile, a contour can be obtained for a desired thickness profile. The contoured mask is then placed on the opening of the shield-can. The number of passes and the moving speed of the substrate are determined according to the required thickness and the growth-rate calibration. The mirror coating profile is determined from the ideal surface figure of a focus ellipse and that obtained from a long trace profiler on the substrate. Preliminary test results using Au as a coating material are presented.

Proceedings Article | 24 December 2002 Paper

3D surface profile measurements of large x-ray synchrotron radiation mirrors using stitching interferometry

Lahsen Assoufid, Michael Bray, Jun Qian, Deming Shu

Proc. SPIE. 4782, X-Ray Mirrors, Crystals, and Multilayers II

KEYWORDS: Mirrors, X-rays, Calibration, Interferometers, Synchrotron radiation, 3D metrology, Stitching interferometry, Surface finishing, Metrology, Interferometry

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Proceedings Article | 21 November 2002 Paper

Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography

Ralu Divan, Derrick Mancini, Nicolai Moldovan, Barry Lai, Lahsen Assoufid, Quinn Leonard, Franco Cerrina

Proc. SPIE. 4783, Design and Microfabrication of Novel X-Ray Optics

KEYWORDS: Gold, Polymethylmethacrylate, Zone plates, X-rays, Hard x-rays, X-ray lithography, Electroplating, Scanning electron microscopy, Plating, Photomasks

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Proceedings Article | 14 November 2001 Paper

Surface quality of x-ray mirrors evaluated at the advanced photon source

Lahsen Assoufid, Ali Khounsary, Jun Qian, Albert Macrander, Dennis Mills

Proc. SPIE. 4501, X-Ray Mirrors, Crystals, and Multilayers

KEYWORDS: Mirrors, X-rays, Silicon carbide, Glasses, Surface finishing, Surface roughness, Silicon, Metrology, Polishing, Coating

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Proceedings Article | 25 January 2001 Paper

Future metrology needs for FEL reflective optics

Lahsen Assoufid

Proc. SPIE. 4143, X-Ray FEL Optics and Instrumentation

KEYWORDS: Metrology, Mirrors, Free electron lasers, X-rays, X-ray optics, Synchrotron radiation, Surface finishing, Standards development, Optical components, Reflectivity

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Proceedings Article | 16 November 1999 Paper

Is colder better? Exploring the feasibility of liquid-helium-cooled optics

Lahsen Assoufid, Dennis Mills, Albert Macrander, Gordon Tajiri

Proc. SPIE. 3773, X-Ray Optics Design, Performance, and Applications

KEYWORDS: Liquids, Helium, Monochromators, Crystals, Silicon, Nitrogen, X-rays, Distortion, Finite element methods, Laser crystals

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Proceedings Article | 13 November 1998 Paper

Metrology of a mirror at the Advanced Photon Source: comparison between optical and x-ray measurements

Lahsen Assoufid, Jonathan Lang, Jin Wang, George Srajer

Proc. SPIE. 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications

KEYWORDS: Mirrors, X-rays, X-ray optics, Metrology, Optical testing, CCD cameras, Error analysis, Synchrotron radiation, Monochromators, Optics manufacturing

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Proceedings Article | 11 December 1997 Paper

Thermal contact resistance across a copper-silicon interface

Ali Khounsary, David Chojnowski, Lahsen Assoufid, William Worek

Proc. SPIE. 3151, High Heat Flux and Synchrotron Radiation Beamlines

KEYWORDS: Interfaces, Resistance, Silicon, Indium, Copper, Temperature metrology, Silver, Liquids, Heat flux, Mirrors

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Proceedings Article | 22 November 1996 Paper

Contact-cooled U-monochromators for high-heat-load x-ray beamlines

Ali Khounsary, Wenbing Yun, Emil Trakhtenberg, Shenglan Xu, Lahsen Assoufid, Wah Keat Lee

Proc. SPIE. 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II

KEYWORDS: Monochromators, Crystals, Mirrors, X-rays, Silicon, Laser crystals, Heat flux, Copper, Crystallography, Cryogenics

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Proceedings Article | 21 November 1996 Paper

Contact-cooled U monochromators for high heat load x-ray beamlines

Ali Khounsary, Wenbing Yun, Emil Trakhtenberg, Shenglan Xu, Lahsen Assoufid, Wah Keat Lee

Proc. SPIE. 2855, High Heat Flux Engineering III

KEYWORDS: Monochromators, Crystals, X-rays, Mirrors, Silicon, Heat flux, Laser crystals, Copper, Crystallography, Cryogenics

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Proceedings Article | 21 November 1996 Paper

Modeling of the performance of a liquid-gallium-cooled silicon monochromator for a high-energy-resolution scattering beamline: comparison with experimental data

Lahsen Assoufid, K. Quast, H. L. Thomas Nian

Proc. SPIE. 2855, High Heat Flux Engineering III

KEYWORDS: Monochromators, Crystals, Finite element methods, Heat flux, Silicon, Gallium, Scattering, Liquids, Data modeling, Laser scattering

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SPIE Journal Paper | 1 February 1995

High heat load monochromator development at the Advanced Photon Source

Wah Keat Lee, Dennis Mills, Lahsen Assoufid, Robert Blasdell, Patricia Fernandez, Carey Rogers, Robert Smither

OE Vol. 34 Issue 02

KEYWORDS: Crystals, Silicon, Monochromators, X-rays, Liquids, Laser crystals, Diamond, Liquid crystals, Diffraction, Metals

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Showing 5 of 55 publications

Proceedings Volume Editor (10)

SPIE Conference Volume | 18 September 2020

Advances in Metrology for X-Ray and EUV Optics IX

SPIE Conference Volume | 4 October 2019

Advances in Metrology for X-Ray and EUV Optics VIII

SPIE Conference Volume | 27 October 2017

Advances in Metrology for X-Ray and EUV Optics VII

SPIE Conference Volume | 5 December 2016

Advances in Metrology for X-Ray and EUV Optics VI

SPIE Conference Volume | 7 October 2014

Advances in Metrology for X-Ray and EUV Optics V

Showing 5 of 10 publications

Conference Committee Involvement (28)

Advances in X-Ray/EUV Optics and Components XVI

1 August 2021 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XV

26 August 2020 | Online Only, California, United States

Advances in Metrology for X-Ray and EUV Optics IX

24 August 2020 | Online Only, California, United States

Advances in X-Ray/EUV Optics and Components XIV

14 August 2019 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VIII

11 August 2019 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XIII

20 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XII

8 August 2017 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VII

6 August 2017 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XI

31 August 2016 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VI

29 August 2016 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components X

11 August 2015 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components IX

19 August 2014 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics V

18 August 2014 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VIII

26 August 2013 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VII

13 August 2012 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics IV

12 August 2012 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components VI

22 August 2011 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components V

2 August 2010 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics III

1 August 2010 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components IV

3 August 2009 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components III

11 August 2008 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics II

30 August 2007 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components II

27 August 2007 | San Diego, California, United States

Advances in X-Ray/EUV Optics, Components, and Applications

14 August 2006 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics

2 August 2005 | San Diego, California, United States

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II

5 August 2004 | Denver, Colorado, United States

Micromachining Technology for Microoptics and Nanooptics II

28 January 2004 | San Jose, California, United States

Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications

7 August 2003 | San Diego, California, United States

Showing 5 of 28 Conference Committees

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