Ms. Lanlan Li Profile

Lanlan Li

at Institute of Optics and Electronics CAS

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Publications (5)

Proceedings Article | 15 January 2021 Paper

Monte Carlo simulation of laser illumination system using return photon counts

Lanlan Li, Lei Zhou

Proceedings Volume 11761, 117610Y (2021) https://doi.org/10.1117/12.2587239

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Proceedings Article | 4 December 2020 Paper

Synchronization control based on phase compensation of tracking error of wafer and reticle stage in step and scan lithographic equipment

Lanlan Li, Song Hu, Lixin Zhao, Jianchao Li, Xiongxing Zhang

Proceedings Volume 11617, 116171Q (2020) https://doi.org/10.1117/12.2585207

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Proceedings Article | 23 August 2013 Paper

Iterative learning control for synchronization of reticle stage and wafer stage in step-and-scan lithographic equipment

Lan-lan Li, Song Hu, Li-xin Zhao, Ping Ma

Proceedings Volume 8911, 89110X (2013) https://doi.org/10.1117/12.2034943

KEYWORDS: Semiconducting wafers, Reticles, Scanners, Control systems, Lithographic equipment, Computer simulations, Device simulation, Integrated circuits, Virtual reality, Lithography

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Proceedings Article | 15 October 2012 Paper

Study on Control Strategy for Coarse/Fine Dual-stage of Step and Scan Lithography

Qi Liu, Ping Ma, Song Hu, Lanlan Li, Jiangping Zhu, Zhuang Sheng

Proceedings Volume 8418, 84180X (2012) https://doi.org/10.1117/12.971471

KEYWORDS: Lithography, Control systems, Actuators, Mathematical modeling, Optics manufacturing, Feedback control, Servomechanisms, Integrated circuits, Device simulation, Interferometers

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Proceedings Article | 15 October 2012 Paper

Synchronous control strategy of wafer and reticle stage of step and scan lithography

Lanlan Li, Song Hu, Lixin Zhao, Ping Ma

Proceedings Volume 8418, 84180M (2012) https://doi.org/10.1117/12.971476

KEYWORDS: Semiconducting wafers, Reticles, Lithography, Control systems, Systems modeling, Visualization, Lithium, Image quality, Projection lithography, Manufacturing

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