CONFERENCE PROCEEDINGS
Advanced Search
Lanlan Shen
at SIMIT
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 12 October 2016 Paper
Phase change properties of Ti-Sb-Te thin films deposited by thermal atomic layer deposition
Sannian Song, Lanlan Shen, Zhitang Song, Dongning Yao, Tianqi Guo, Le Li, Bo Liu, Liangcai Wu, Yan Cheng, Yuqiang Ding, Songlin Feng
Proceedings Volume 9818, 98180N (2016) https://doi.org/10.1117/12.2246211
KEYWORDS: Atomic layer deposition, Thin film deposition, Thin films, Resistance, Crystals, Chalcogenides, Chemical vapor deposition, Scanning electron microscopy, Fast packet switching, Switching
Proceedings Article | 12 October 2016 Paper
Reactive ion etching effects on carbon-doped Ge2Sb2Te5 phase change material in CF4/Ar plasma
Lanlan Shen, Sannian Song, Zhitang Song, Le Li, Tianqi Guo, Bo Liu, Liangcai Wu, Yan Cheng, Songlin Feng
Proceedings Volume 9818, 98180M (2016) https://doi.org/10.1117/12.2245726
KEYWORDS: Crystals, Reactive ion etching, Plasma, Carbon, Etching, Polymers, Argon, Fluorine, Ions, Anisotropy
Proceedings Article | 12 October 2016 Paper
Investigation of (SiC)0.85-Sb3Te alloy for high-reliability PCM applications
Tianqi Guo, Sannian Song, Le Li, Lanlan Shen, Bo Liu, Zhitang Song, Ming Qi, Songlin Feng
Proceedings Volume 9818, 98180U (2016) https://doi.org/10.1117/12.2246984
KEYWORDS: Silicon carbide, Doping, Crystals, Resistance, Tellurium, Transmission electron microscopy, Silicon, Antimony, Reliability, Switching
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top