Larry S. Zurbrick
Solutions Marketing Manager at Keysight Technologies Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (31)

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Defect detection, Sensors, Etching, Quartz, Manufacturing, Inspection, Photomasks, Resolution enhancement technologies

Proceedings Article | 20 August 2004 Paper
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Reticles, Etching, Quartz, Manufacturing, Inspection, Attenuators, Photomasks, Neodymium, Vestigial sideband modulation, Resolution enhancement technologies

Proceedings Article | 20 August 2004 Paper
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Reticles, Defect detection, Deep ultraviolet, Sensors, Databases, Quartz, Image processing, Inspection, Image transmission

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Lithography, Defect detection, Detection and tracking algorithms, Quartz, Inspection, Photomasks, Algorithm development, Semiconducting wafers, Phase shifts, Defect inspection

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Phase contrast, Defect detection, Deep ultraviolet, Quartz, Manufacturing, Inspection, Photomasks, Computer aided design, Phase shifts

Showing 5 of 31 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 23 September 2009

SPIE Conference Volume | 17 October 2008

Conference Committee Involvement (7)
Photomask Technology
26 September 2021 | Monterey, California, United States
Photomask Technology
21 September 2020 | Online Only, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
19 September 2011 | Monterey, California, United States
Photomask Technology
15 September 2009 | Monterey, California, United States
Showing 5 of 7 Conference Committees
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