Dr. Lars-Christian Wittig
at Carl Zeiss Jena GmbH
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 4 March 2019 Paper
Stefan Richter, Carsten Wehe, Uwe Wolf, Thomas Nobis, Lars-Christian Wittig, Philipp Huebner, Alexander Froeber, Gerhard Krampert, Dirk Thiele, Joerg Muetze, Michael Kempe
Proceedings Volume 10931, 109310K (2019) https://doi.org/10.1117/12.2514552
KEYWORDS: Mirrors, Confocal microscopy, Microelectromechanical systems, Imaging systems, Control systems, Microscopes, Field programmable gate arrays, Laser scanners

Proceedings Article | 3 November 2003 Paper
Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.508492
KEYWORDS: Lithography, Photomasks, Calibration, Photoresist materials, Prisms, Optical lithography, Absorption, Photoresist developing, Optical components, Picture Archiving and Communication System

Proceedings Article | 3 November 2003 Paper
Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.505751
KEYWORDS: Photomasks, Manufacturing, Lithography, Beam shaping, Analog electronics, Optical components, Photoresist processing, Optical lithography, Optics manufacturing, Glasses

Proceedings Article | 9 November 2001 Paper
Proceedings Volume 4440, (2001) https://doi.org/10.1117/12.448033
KEYWORDS: Computer generated holography, Diffraction gratings, Diffraction, Chemical elements, Wavefronts, Aspheric lenses, Optical components, Beam shaping, Quartz, Spherical lenses

Proceedings Article | 9 November 2001 Paper
Proceedings Volume 4440, (2001) https://doi.org/10.1117/12.448044
KEYWORDS: Beam shaping, Semiconductor lasers, Optical components, Lithography, Photomasks, Fabrication, Wave propagation, Surface roughness, Electron beams, Heat treatments

Showing 5 of 12 publications
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