Dr. Laurence Singleton
at Fraunhofer ICT-IMM
SPIE Involvement:
Publications (6)

Proceedings Article | 28 May 2003 Paper
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Gold, Lithography, Polymethylmethacrylate, X-rays, Silicon, Manufacturing, Photomasks, Beryllium, X-ray lithography, X-ray technology

Proceedings Article | 25 March 2003 Paper
Proc. SPIE. 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly
KEYWORDS: Gold, Lithography, Electron beam lithography, Ultraviolet radiation, X-rays, Silicon, Manufacturing, Photomasks, Synchrotron radiation, X-ray lithography

Proceedings Article | 17 January 2003 Paper
Proc. SPIE. 4984, Micromachining Technology for Micro-Optics and Nano-Optics
KEYWORDS: Lithography, Polymethylmethacrylate, Waveguides, Polymers, X-rays, Manufacturing, Structured optical fibers, Photomasks, Optical alignment, X-ray lithography

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Oxides, Lithography, Polymethylmethacrylate, Polymers, X-rays, Polymerization, Photomasks, Synchrotron radiation, Photoresist processing, X-ray lithography

Proceedings Article | 20 August 2001 Paper
Proc. SPIE. 4343, Emerging Lithographic Technologies V
KEYWORDS: Polymethylmethacrylate, Calibration, Photons, X-rays, Scanning electron microscopy, Photomasks, Aluminum, Synchrotrons, Critical dimension metrology, X-ray lithography

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