Dr. Lauryna Siaudinyte Profile

Dr. Lauryna Siaudinyte

at Technische Univ Delft

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Publications (1)

Proceedings Article | 20 March 2020 Paper

Wavelength influence on the determination of subwavelength grating parameters by using optical scatterometry

Lauryna Siaudinyte, Silvania Pereira

Proceedings Volume 11325, 113252M (2020) https://doi.org/10.1117/12.2544156

KEYWORDS: Near field, Scatterometry, Diffraction gratings, Near field optics, Silicon, Electromagnetism, Diffraction, Analytical research, Phase shifts, Numerical simulations

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