Dr. Lee J. Richter Profile

Dr. Lee J. Richter

at National Institute of Standards and Technology

SPIE Involvement:

Author

Proceedings Article | 13 March 2024 Poster

Development of optical medical imaging standards at the National Institute of Standards and Technology

Jeeseong Hwang, Alexis Lee, Kimberly Briggman, Nikki Rentz, David Allen, Lee Richter, John Lu

Proceedings Volume PC12833, PC128330L (2024) https://doi.org/10.1117/12.3009503

KEYWORDS: Optical resolution, Optical medical imaging, Image resolution, Optical coherence tomography, Optical calibration, Tissues, Tissue optics, Surface plasmons, Refraction, Optical coherence

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Proceedings Article | 10 March 2020 Presentation

Structure-property relationship in blade-coated amorphous In2O3 thin-film transistors (Conference Presentation)

Ahmad Kirmani, Emily Roe, Lee Richter

Proceedings Volume 11281, 112811F (2020) https://doi.org/10.1117/12.2545326

KEYWORDS: Thin films, Transistors, Combustion, Coating, Electronics, Sol-gels, Chemistry, Crystals, Metals, Oxides

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Proceedings Article | 26 March 2011 Paper

Optics contamination studies in support of high-throughput EUV lithography tools

S. Hill, N. Faradzhev, L. Richter, S. Grantham, C. Tarrio, T. Lucatorto, S. Yulin, M. Schürmann, V. Nesterenko, T. Feigl

Proceedings Volume 7969, 79690M (2011) https://doi.org/10.1117/12.879852

KEYWORDS: Contamination, Extreme ultraviolet lithography, Extreme ultraviolet, EUV optics, Carbon, Molecules, Synchrotrons, Mirrors, Ruthenium, Spectroscopic ellipsometry

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Proceedings Article | 26 March 2011 Paper

The NIST EUV facility for advanced photoresist qualification using the witness-sample test

S. Grantham, C. Tarrio, S. Hill, L. Richter, T. Lucatorto, J. van Dijk, C. Kaya, N. Harned, R. Hoefnagels, M. Silova, J. Steinhoff

Proceedings Volume 7969, 79690K (2011) https://doi.org/10.1117/12.879519

KEYWORDS: Extreme ultraviolet lithography, Semiconducting wafers, Photoresist materials, Extreme ultraviolet, Contamination, Scanners, Electrons, Mirrors, Carbon, Synchrotrons

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Proceedings Article | 23 March 2010 Paper

A simple null-field ellipsometric imaging system (NEIS) for in-situ monitoring of EUV-induced deposition on EUV optics

Rashi Garg, Nadir Faradzhev, Shannon Hill, Lee Richter, P. S. Shaw, R. Vest, T. Lucatorto

Proceedings Volume 7636, 76361Z (2010) https://doi.org/10.1117/12.855967

KEYWORDS: Carbon, EUV optics, Imaging systems, Extreme ultraviolet, Extreme ultraviolet lithography, Dielectrics, Polarizers, Ellipsometry, Contamination, Thin films

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Proceedings Article | 20 March 2010 Paper

Complex species and pressure dependence of intensity scaling laws for contamination rates of EUV optics determined by XPS and ellipsometry

S. Hill, N. Faradzhev, L. Richter, T. Lucatorto

Proceedings Volume 7636, 76360E (2010) https://doi.org/10.1117/12.846849

KEYWORDS: Contamination, Extreme ultraviolet lithography, Carbon, Molecules, Extreme ultraviolet, Protactinium, EUV optics, Adsorption, Synchrotrons, Electrons

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Proceedings Article | 18 March 2009 Paper

In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry

Heather Patrick, Thomas Germer, Yifu Ding, Hyun Wook Ro, Lee Richter, Christopher Soles

Proceedings Volume 7271, 727128 (2009) https://doi.org/10.1117/12.815360

KEYWORDS: Scatterometry, Data modeling, Annealing, Polymers, Ellipsometry, Solids, Atomic force microscopy, Nanoimprint lithography, In situ metrology, Statistical modeling

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Proceedings Article | 13 September 2007 Paper

Distinguishing between nonlinear channel transport and contact effects in organic FETs

B. Hamadani, J. LeBoeuf, R. J. Kline, I. McCulloch, M. Heeney, C. Richter, L. Richter, D. Gundlach

Proceedings Volume 6658, 66580V (2007) https://doi.org/10.1117/12.734433

KEYWORDS: Field effect transistors, Instrument modeling, Transistors, Polymers, Resistance, Data modeling, Semiconductors, Gold, Electrodes, Information operations

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Proceedings Article | 29 September 2000 Paper

Assessment of sensitivity advances in near-field Raman spectroscopy

Chris Michaels, Claire Dentinger, Lee Richter, D. Chase, Richard Cavanagh, Stephan Stranick

Proceedings Volume 4098, (2000) https://doi.org/10.1117/12.401636

KEYWORDS: Raman spectroscopy, Near field, Near field scanning optical microscopy, Diamond, Silver, Spatial resolution, Resonance enhancement, Crystals, Rhodamine B, Raman scattering

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Proceedings Article | 29 September 2000 Paper

Chemical imaging with scanning near-field infrared microscopy and spectroscopy

Chris Michaels, Lee Richter, Richard Cavanagh, Stephan Stranick

Proceedings Volume 4098, (2000) https://doi.org/10.1117/12.401616

KEYWORDS: Near field, Infrared radiation, Near field scanning optical microscopy, Infrared imaging, Spatial resolution, Near field optics, Microscopes, Gold, Silicon, Infrared microscopy

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Proceedings Article | 15 December 1999 Paper

Nonlinear optics as a detection scheme for biomimetic sensors: SFG spectroscopy of hybrid bilayer membrane formation

Teresa Petralli-Mallow, Kimberly Briggman, Lee Richter, John Stephenson, Anne Plant

Proceedings Volume 3858, (1999) https://doi.org/10.1117/12.372926

KEYWORDS: Interfaces, Spectroscopy, Molecules, Biomimetics, Self-assembled monolayers, Gold, Bioalcohols, Nonlinear optics, Sensors, Sum-frequency generation

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Proceedings Article | 1 July 1990 Paper

Laser-induced desorption: state-resolved evidence for carrier-driven processes

Richard Cavanagh, S. Buntin, Lee Richter, David King

Proceedings Volume 1208, (1990) https://doi.org/10.1117/12.17864

KEYWORDS: Laser induced damage, Platinum, Metals, Data modeling, Chemical analysis, Molecules, Ions, Molecular lasers, Semiconductors, Chemical species

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Showing 5 of 12 publications

Conference Committee Involvement (4)

Physical Chemistry of Semiconductor Materials and Interfaces XXII

20 August 2023 | San Diego, California, United States

Physical Chemistry of Semiconductor Materials and Interfaces XXI

23 August 2022 | San Diego, California, United States

Physical Chemistry of Semiconductor Materials and Interfaces XX

2 August 2021 | San Diego, California, United States

Physical Chemistry of Semiconductor Materials and Interfaces XIX

24 August 2020 | Online Only, California, United States

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