Prof. Lei Tao Profile

Prof. Lei Tao

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Publications (2)

Proceedings Article | 4 December 2024 Paper

Characterization of wafer surface morphology based on atomic force microscopy

Yueqing Ding, Chong Yue, Lei Tao, Long Chen, Jin Zhou

Proceedings Volume 13283, 132832I (2024) https://doi.org/10.1117/12.3036788

KEYWORDS: Semiconducting wafers, Atomic force microscopy, Surface roughness, Interferometers, Semiconductors, Microelectronics, Optical surfaces, Atomic force microscope, Time metrology

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Proceedings Article | 18 November 2024 Paper

Determination of the characteristic parameter of nanofilm based on ellipsometer and scanning electron microscope

Chong Yue, Lei Tao, Jin Zhou, Jun Xiong, Weifen He

Proceedings Volume 13398, 1339814 (2024) https://doi.org/10.1117/12.3049736

KEYWORDS: Film thickness, Thin films, Scanning electron microscopy, Ellipsometry, Electron microscopes, Nanofilms, Reflection, Systems modeling, Dispersion, Mathematical modeling

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