Dr. Leifeng Cao
at China Academy of Engineering Physics
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 18 October 2017 Presentation
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Diffraction, X-ray optics, Spectroscopy, Crystals, X-rays, X-ray diffraction, X-ray astronomy, Plasma diagnostics, Plasma spectroscopy, Diffraction gratings

Proceedings Article | 23 August 2017 Presentation + Paper
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Gold, Lithography, Electron beam lithography, Diffraction, Spectroscopy, X-rays, X-ray diffraction, X-ray lithography, Diffraction gratings

SPIE Journal Paper | 19 August 2017
JM3 Vol. 16 Issue 03
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

Proceedings Article | 25 August 2010 Paper
Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III
KEYWORDS: Optical components, Microscopes, Mirrors, Multilayers, Copper, Reflectivity, Objectives, Spatial resolution, Plasma diagnostics, Plasma

SPIE Journal Paper | 1 May 2008
OE Vol. 47 Issue 05
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Showing 5 of 8 publications
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