Micro-resonator modulators working in the critical coupling mode is usually sensitive to fabrication variation. We employ two modulated racetrack-resonators symmetrically coupled to a waveguide on two sides on a silicon-on-insulator wafer. The structure in the strong-coupling regime can perform modulation function stably through the interference of two racetracks. Fabrication variation (30~50%) of coupling constant or quality factor can be compensated by static voltage bias applied on the diode-embedded resonators. Detailed working principle and fabrication-variation compensation will be presented. Experimentally, we demonstrate 50 ~ 56 Gb/s modulation with high extinction ratio of 7.9 ~ 9.4 dB and high signal-to-noise ratio of 6~7, while maintaining low driving voltage (<2.5 Vpp) and small size (tens of microns).
This work introduces a 2×2 silicon thermo-optical switch based on photonic crystal waveguides. Photonic crystal waveguides (PCWs) were used to replace conventional channel waveguides in the phase shifters of a Mach-Zehnder interferometer (MZI). This device was fabricated on silicon-on-insulator (SOI) platform. The active length of the PCWs-based phase shifter was only 50μm. Because of the slow light effect of PCWs, the heat needed to generate a phase shift of π reduced dramatically. The experiment results showed that the power needed for phase shifter of π is 6 times less than that of conventional MZI based optical switches.
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