Dr. Lennon Y. T. Lee
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11689, Integrated Optics: Devices, Materials, and Technologies XXV
KEYWORDS: Gas sensors, Carbon dioxide, Waveguides, Sensors, Silicon, Deep reactive ion etching, Wet etching, Infrared technology, Semiconducting wafers, Hollow waveguides

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Microelectromechanical systems, Infrared detectors, Thermography, Infrared sensors, Thin films, Sensors, Infrared radiation, Aluminum nitride, pyroelectric detectors, Absorption

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Thermal sensing, Microelectromechanical systems, Mid-IR, Optical sensors, Silicon, Photonic crystals, Process control, Sensing systems, Biological and chemical sensing, Industrial chemicals

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