Dr. Leonard Lublin Profile

Dr. Leonard Lublin

at Cymer Inc

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Publications (1)

Proceedings Article | 26 June 2003 Paper

High-performance beam stabilization for next-generation ArF beam delivery systems

Leonard Lublin, David Warkentin, Palash Das, Alexander Ershov, Jody Vipperman, Ronald Spangler, Brian Klene

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485351

KEYWORDS: Mirrors, Scanners, Personal digital assistants, Light sources, Sensors, Metrology, Beam delivery, Semiconducting wafers, Control systems, Laser scanners

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