Dr. Leonid I. Goray Profile

Dr. Leonid I. Goray

at Instrumentation International Intellectual Group Inc

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Author

Publications (18)

Proceedings Article | 23 May 2011 Paper

Solution of the inverse problem of diffraction from low-dimensional periodically arranged nanocrystals

Leonid Goray

Proceedings Volume 8083, 80830L (2011) https://doi.org/10.1117/12.889418

KEYWORDS: Diffraction gratings, Diffraction, Inverse problems, Scatterometry, Polarization, Refractive index, Nanocrystals, Silicon, Algorithm development, Mirrors

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Proceedings Article | 27 August 2010 Paper

High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments

Dmitriy Voronov, Minseung Ahn, Eric Anderson, Rossana Cambie, Chih-Hao Chang, Leonid Goray, Eric Gullikson, Ralf Heilmann, Farhad Salmassi, Mark Schattenburg, Tony Warwick, Valeriy Yashchuk, Howard Padmore

Proceedings Volume 7802, 780207 (2010) https://doi.org/10.1117/12.861287

KEYWORDS: Diffraction gratings, Multilayers, Silicon, Diffraction, Transmission electron microscopy, Etching, Chemical species, Diffusion, Extreme ultraviolet, X-rays

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Proceedings Article | 17 June 2009 Paper

Specular and diffuse scattering from random asperities of any profile using the rigorous method for x-rays and neutrons

Leonid Goray

Proceedings Volume 7390, 73900V (2009) https://doi.org/10.1117/12.827444

KEYWORDS: Scattering, X-rays, Reflectivity, Mirrors, Diffraction, Gold, Grazing incidence, Diffraction gratings, Polarization, Matrices

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Proceedings Article | 18 June 2007 Paper

A rigorous solution for electromagnetic scattering from any kind of asperities of multilayer 1-D structures in the X-ray–VUV ranges

Leonid Goray

Proceedings Volume 6617, 661719 (2007) https://doi.org/10.1117/12.726038

KEYWORDS: Scattering, X-rays, Diffraction gratings, Mirrors, Reflectivity, Diffraction, Multilayers, Grazing incidence, Statistical modeling, Vacuum ultraviolet

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Proceedings Article | 29 August 2006 Paper

Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography

Leonid Goray

Proceedings Volume 6317, 63170O (2006) https://doi.org/10.1117/12.678151

KEYWORDS: Diffraction gratings, Molybdenum, Extreme ultraviolet, Optical filters, Silicon, Atomic force microscopy, Reflectivity, Extreme ultraviolet lithography, Diffraction, X-rays

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Proceedings Article | 29 August 2006 Paper

Measurement of zone plate efficiencies in the extreme ultraviolet and applications to radiation monitors for absolute spectral emission

John Seely, Glenn Holland, James Bremer, Tim Zukowski, Michael Feser, Yan Feng, Benjawan Kjornrattanawanich, Leonid Goray

Proceedings Volume 6317, 63170N (2006) https://doi.org/10.1117/12.678142

KEYWORDS: Sensors, Extreme ultraviolet, Zone plates, Diffraction, Visible radiation, Silicon, Gold, Signal detection, Solar radiation, Transmittance

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The diffraction efficiencies of a Fresnel zone plate (ZP), fabricated by Xradia Inc. using the electron-beam writing technique, were measured using polarized, monochromatic synchrotron radiation in the extreme ultraviolet wavelength range 3.4-22 nm. The ZP had 2 mm diameter, 3330 zones, 150 nm outer zone width, and a 1 mm central occulter. The ZP was supported by a 100 nm thick Si₃N₄ membrane. The diffraction patterns were recorded by CMOS imagers with phosphor coatings and with 5.2 μm or 48 μm pixels. The focused +n orders (n=1-4), the diverging -1 order, and the undiffracted 0 order were observed as functions of wavelength and off-axis tilt angle. Sub-pixel focusing of the +n orders was achieved. The measured efficiency in the +1 order was in the 5% to 30% range with the phase-shift enhanced efficiency occurring at 8.3 nm where the gold bars are partially transmitting. The +2 and higher order efficiencies were much lower than the +1 order efficiency. The efficiencies were constant when the zone plate was tilted by angles up to ±1° from the incident radiation beam. This work indicates the feasibility and benefits of using zone plates to measure the absolute EUV spectral emissions from solar and laboratory sources: relatively high EUV efficiency in the focused +1 order, good out-of-band rejection resulting from the low higher-order efficiencies and the ZP focusing properties, insensitivity to (unfocused) visible light scattered by the ZP, flat response with off-axis angle, and insensitivity to the polarization of the radiation based on the ZP circular symmetry. EUV sensors with Fresnel zone plates potentially have many advantages over existing sensors intended to accurately measure absolute EUV emission levels, such as those implemented on the GOES N-P satellites that use transmission gratings which have off-axis sensitivity variations and poor out-of-band EUV and visible light rejection, and other solar and laboratory sensors using reflection gratings which are subject to response variations caused by surface contamination and oxidation.

Proceedings Article | 10 September 2005 Paper

Wavelength separation of plus and minus orders of soft-x-ray–EUV multilayer-coated gratings at near-normal incidence

Leonid Goray, John Seely

Proceedings Volume 5900, 59000C (2005) https://doi.org/10.1117/12.614565

KEYWORDS: Diffraction gratings, Multilayers, Extreme ultraviolet, Diffraction, Coating, Mirrors, Reflectivity, Spectroscopy, Space operations, Optical design

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The validity of approximating the efficiency of a multilayer grating operating at close to normal incidence in the soft-X-ray-EUV range with a product of the relative grating efficiency by the reflectance of its multilayer coating has been studied by the rigorous integral method. The widely used approximated approach has until recently been considered accurate enough for analysis of short-wavelength normal-incidence multilayer-coated gratings. Real gratings employed in the soft-X-ray-EUV range are used to demonstrate the inapplicability of this approximation to an analysis of precise positions of efficiency maxima for the external (n > 0) and internal (n < 0) diffraction orders, despite the small ratios of wavelength and groove depth to period. The present authors have performed an analysis of the accuracy inherent in a derived simple expression for spectral separation of the same plus and minus orders with respect to the wavelength, order's number, incident angle, period, and groove depth. The reason for the observed substantial (a few Angstrom or even nm) wavelength separation between the maxima of positive and negative orders is related to oblique, close-tonormal incidence of radiation on a grating operating in the short-wavelength spectral region and different angles of deviation of respective orders. The modeling carried out with the commercial code PCGrate-S(X) v.6.1 permitted not only prediction of the separation between positive and negative orders for a multilayer Mo/Si 4200-gr/mm grating with FM-measured trapezoidal groove profile, which is designed for operation in the EIS spectrometer on the Solar-B spacecraft, but obtaining a good agreement with synchrotron radiation measurements, including high orders as well. A conclusion is drawn that high-precision calculations of the efficiency of multilayer normal-incidence soft-X-ray-EUV range gratings have in some cases to be performed, although this may require increasing the computation time by several times compared to the commonly used approximate approach.

Proceedings Article | 1 September 2005 Paper

Off-plane grazing-incidence Constellation-X grating calibrations using polarized synchrotron radiation and PCGRATE code calculations

J. Seely, L. Goray, Benjawan Kjornrattanawanich, J. Laming, G. Holland, K. Flanagan, R. Heilmann, C.-H. Chang, M. Schattenburg, A. Rasmussen

Proceedings Volume 5900, 59000B (2005) https://doi.org/10.1117/12.615943

KEYWORDS: Diffraction gratings, Polarization, Photodiodes, Diffraction, Calibration, Synchrotron radiation, X-rays, Synchrotrons, Spectroscopy, Imaging systems

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Proceedings Article | 14 October 2004 Paper

Extreme ultraviolet optical constants for the design and fabrication of multilayer-coated gratings

John Seely, Leonid Goray, David Windt, Benjawan Kjornrattanawanich, Yurii Uspenskii, Alexander Vinogradov

Proceedings Volume 5538, (2004) https://doi.org/10.1117/12.559053

KEYWORDS: Multilayers, Reflectivity, Optical coatings, Silicon, Extreme ultraviolet, Mirrors, Molybdenum, Optical design, Diffraction gratings, Beryllium

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Proceedings Article | 29 January 2004 Paper

Rigorous efficiency calculations for blazed gratings working in in- and off-plane mountings in the 5–50-Å wavelengths range

Leonid Goray

Proceedings Volume 5168, (2004) https://doi.org/10.1117/12.505679

KEYWORDS: Diffraction gratings, Diffraction, Polarization, Spectroscopy, X-ray telescopes, Roentgenium, Gold, X-rays, Spectral resolution, Optical design

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Proceedings Article | 16 April 2001 Paper

Modified integral method for weak convergence problems of light scattering on relief grating

Leonid Goray

Proceedings Volume 4291, (2001) https://doi.org/10.1117/12.424838

KEYWORDS: Diffraction gratings, Diffraction, Polarization, Magnetism, Metals, Dielectrics, Chemical elements, Dielectric polarization, Curium, Light scattering

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Proceedings Article | 16 April 2001 Paper

Modified integral method and real electromagnetic properties of echelles

Leonid Goray

Proceedings Volume 4291, (2001) https://doi.org/10.1117/12.424847

KEYWORDS: Polarization, Refractive index, Absorption, Diffraction gratings, Diffraction, Electromagnetism, Manufacturing, Aluminum, Visualization, Autocollimation

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Proceedings Article | 29 September 1999 Paper

Normal incidence multilayer gratings for the extreme ultraviolet region: experimental measurements and computational modeling

John Seely, Leonid Goray

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363650

KEYWORDS: Aluminum, Diffraction gratings, Reflectivity, Coating, Extreme ultraviolet, Atomic force microscopy, Multilayers, Software, Diffraction, Opacity

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Proceedings Article | 22 September 1995 Paper

Rigorous integral method in application to computing diffraction on relief gratings working in wavelength range from microwaves to x ray

Leonid Goray

Proceedings Volume 2532, (1995) https://doi.org/10.1117/12.221255

KEYWORDS: Diffraction gratings, Diffraction, X-rays, Microwave radiation, Numerical analysis, Extreme ultraviolet, Mathematical modeling, Optical design, Refractive index, Gold

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Proceedings Article | 20 June 1995 Paper

Comparison of rigorous methods for x-ray and XUV grating diffraction analysis

Leonid Goray, Boris Chernov

Proceedings Volume 2515, (1995) https://doi.org/10.1117/12.212594

KEYWORDS: Diffraction gratings, Diffraction, Gold, X-rays, Extreme ultraviolet, X-ray diffraction, Maxwell's equations, Numerical analysis, Electromagnetism, Refractive index

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Proceedings Article | 12 July 1994 Paper

Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions

Leonid Goray

Proceedings Volume 2278, (1994) https://doi.org/10.1117/12.180012

KEYWORDS: Diffraction gratings, Coating, Refractive index, X-rays, Gold, Diffraction, Extreme ultraviolet, Reflectivity, Reflection, Flint glass

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Proceedings Article | 12 July 1994 Paper

Numerical analysis for relief gratings working in the soft xray and XUV region by the integral equation method

Leonid Goray

Proceedings Volume 2278, (1994) https://doi.org/10.1117/12.180011

KEYWORDS: Diffraction gratings, Gold, X-rays, Extreme ultraviolet, Numerical analysis, Diffraction, Wave propagation, X-ray diffraction, X-ray detectors, Ultraviolet detectors

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Proceedings Article | 1 February 1991 Paper

Investigation of the arsenic sulphide films for relief-phase holograms

Igor Yusupov, Mikhail Mikhailov, Rudolf Herke, Leonid Goray, S. Mamedov, O. Yakovuk

Proceedings Volume 1238, (1991) https://doi.org/10.1117/12.19398

KEYWORDS: Arsenic, Etching, Chemical species, Holograms, Holography, Sulfur, Scanning tunneling microscopy, Polymers, Manufacturing, Diffraction gratings

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Showing 5 of 18 publications

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