Prof. Leonid V. Sokolov Profile

Prof. Leonid V. Sokolov

at Institute of Aircraft Equipment

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Publications (2)

Proceedings Article | 31 January 2013 Paper

High-temperature SOI pressure sensors on the base of the MEMS micromachining technology

L. Sokolov

Proceedings Volume 8759, 875952 (2013) https://doi.org/10.1117/12.2015261

KEYWORDS: Sensors, Silicon, Microelectromechanical systems, Etching, Heterojunctions, Photomasks, Optical lithography, Micromachining, Manufacturing, Wheatstone bridges

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Proceedings Article | 29 December 2010 Paper

High-temperature microelectromechanical pressure sensors based on a SOI heterostructure for an electronic automatic aircraft engine control system

Leonid Sokolov

Proceedings Volume 7544, 75442P (2010) https://doi.org/10.1117/12.885688

KEYWORDS: Sensors, Microelectromechanical systems, Heterojunctions, Control systems, Silicon, Transducers, Wheatstone bridges, Manufacturing, Temperature metrology, Bridges

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