Li Yan Siow
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Microelectromechanical systems, Infrared detectors, Thermography, Infrared sensors, Thin films, Sensors, Infrared radiation, Aluminum nitride, pyroelectric detectors, Absorption

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