Mr. Li J. Song Profile

Li J. Song

at Cadence Design Systems Inc

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Publications (1)

Proceedings Article | 5 May 2005 Paper

Investigating a lithography strategy for diagonal routing architecture at sub-100nm technology nodes

Song Li, Ting Chen, Santosh Shah, Ketan Joshi, Kalyan Thumaty, Narain Arora

Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.601421

KEYWORDS: Fiber optic illuminators, Optical proximity correction, Metals, Critical dimension metrology, Computer architecture, Resistance, Lithography, Lithographic illumination, Resolution enhancement technologies, Manufacturing

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