In this paper, the method for the electro-optical information processing in the heterodyne profilometer we have made is described. It is based on optical heterodyne interferometry and phase detection techniques. Height variations are less than 1 nm and lateral resolution is less than 2 micrometers . More than ten parameters of surface roughness could be calculated and a real profile of the measured surface could be obtained.
Fringe scanning technique is widely used to test the shape of optical element surfaces. In this paper, a method of image information modulation and processing for a fringe scanning optical profile used to measure surface roughness of precision machinery parts is presented. The reference mirror of a classical Linnik microinterferometer is driven by a piezoelectrical transducer (PZT) modulated using saw-wave, and the phase of interfering fringe is shifted linearly. The image data acquisition system, including a CCD array, PZT, DMAC6844, AD7820, has realized high synchronous data sampling frequency of 250 KB/sec and 10 bit A/D converting. The experimental results show that the converted Linnik microinterferometer can measure the roughness of precision surface where Ra is less than 0.01 m and obtain various standard parameters of roughness. Therefore, the function and precision of the instrument could be enhanced significantly.
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