Dr. LiJiang Qin
Research Associate at RMIT Univ
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Sensors, Laser development, Inspection, Gyroscopes, Computer engineering, Autoregressive models, Piezoresistive sensors, Instrument modeling, Piezoelectric drives

Proceedings Article | 13 November 2002 Paper
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Fabrication, Actuators, Modeling, Design and modelling, Sensors, Magnetism, Amplifiers, Control systems, Control systems design, Prototyping

Proceedings Article | 21 November 2001 Paper
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Lithography, Sensors, Magnetism, Photoresist materials, Sensing systems, Photomasks, Magnetic sensors, Plating, Computer aided design, Semiconducting wafers

Proceedings Article | 21 March 2001 Paper
Proc. SPIE. 4235, Smart Structures and Devices
KEYWORDS: Microelectromechanical systems, Actuators, Iron, Sensors, Copper, Magnetism, Control systems, Smart structures, Plating, Samarium

Proceedings Article | 21 June 2000 Paper
Proc. SPIE. 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS
KEYWORDS: Microelectromechanical systems, Actuators, Sensors, Copper, Reliability, Magnetism, Amplifiers, Control systems, Electromagnetism, Shape memory alloys

Showing 5 of 7 publications
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