Dr. Liang Wang Profile

Dr. Liang Wang

Professor at Univ of Science and Technology of China

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 5 March 2021 Presentation + Paper

Direct laser writing using a planar diffractive lens optimized by genetic algorithm

Kai Xu, Liang Wang

Proceedings Volume 11674, 1167413 (2021) https://doi.org/10.1117/12.2577611

KEYWORDS: Multiphoton lithography, Genetic algorithms, Optimization (mathematics), Laser systems engineering, Diffraction, Zone plates, Semiconducting wafers, Quartz, Nanofabrication

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Proceedings Article | 5 March 2021 Presentation + Paper

Plasmonic uni-traveling-carrier photodiode

Bojian Zhang, Liang Wang

Proceedings Volume 11675, 1167503 (2021) https://doi.org/10.1117/12.2577098

KEYWORDS: Plasmonics, Photodetectors, Photodiodes, Optical instrument design, Absorption, Optical antennas, Structural design, Scattering, Resonance enhancement, Quantum dots

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Proceedings Article | 20 November 2019 Paper

Electrically driven plasmonic antenna

Liang Wang, Yingjian Liu, Jin Qin

Proceedings Volume 11192, 1119208 (2019) https://doi.org/10.1117/12.2538155

KEYWORDS: Antennas, Plasmonics, Surface plasmons, Plasmons, External quantum efficiency, Photons, Cameras, Spectroscopy

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Proceedings Article | 6 February 2019 Paper

Near field optical lithography using ultra-small gap bowtie apertures

Liang Wang, Jin Qin

Proceedings Volume 10842, 108421A (2019) https://doi.org/10.1117/12.2504905

KEYWORDS: Near field, Lithography, Optical lithography, Photomasks, Silicon, Near field optics, Ion beams, Finite-difference time-domain method, Photoresist materials, Chromium

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Proceedings Article | 24 October 2017 Paper

Broadband beam shaping using two cascaded diffractive optical elements with different sizes of effective phase region

Li Ding, Guowei Cao, Jin Guo, Jun Wang, Kun Huang, Yongping Li, Xueliang Kang, Liang Wang

Proceedings Volume 10460, 1046004 (2017) https://doi.org/10.1117/12.2281524

KEYWORDS: Beam shaping, Diffractive optical elements, Phase shift keying, Phase modulation, Beam splitters

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Proceedings Article | 31 October 2016 Paper

Development of next-generation nanolithography methods to break the optical diffraction limit

Huiwen Luo, Liang Wang, Jin Qin, Li Ding

Proceedings Volume 10019, 100190H (2016) https://doi.org/10.1117/12.2240741

KEYWORDS: Optical lithography, Nanolithography, Lithography, Diffraction, Photomasks, Nanoimprint lithography, Near field, Coating, Near field optics, Silicon

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SPIE Journal Paper | 29 September 2016

Numerical and experimental study of near-field scanning optical lithography using nanoscale bowtie apertures with ultrasmall gap size

Li Ding, Jin Qin, Yang Chen, Liang Wang

JM3, Vol. 15, Issue 03, 031611, (September 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.031611

KEYWORDS: Lithography, Near field, Optical lithography, Image quality, Photomasks, Finite-difference time-domain method, Photoresist materials, Near field optics, Nanolithography, 3D modeling

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Proceedings Article | 17 April 2014 Paper

Integration of an EUV metal layer: a 20/14nm demo

Craig Higgins, Erik Verduijn, Xiang Hu, Liang Wang, Mandeep Singh, Jerome Wandell, Sohan Mehta, Jean Raymond Fakhoury, Mark Zaleski, Yi Zou, Hui Peng Koh, Pawitter Mangat

Proceedings Volume 9048, 90481Q (2014) https://doi.org/10.1117/12.2048285

KEYWORDS: Photomasks, Extreme ultraviolet, Semiconducting wafers, Extreme ultraviolet lithography, Metals, Optical lithography, Optical proximity correction, Overlay metrology, Deep ultraviolet, Inspection

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Showing 5 of 8 publications

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