Dr. Lin Wang
Research Associate at Louisiana State Univ
SPIE Involvement:
Publications (6)

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Microscopes, Microfluidics, Optical spheres, Calibration, Glasses, Particles, Luminescence, Fluorescence spectroscopy, Manufacturing, Magnetism

SPIE Journal Paper | 1 July 2004
JM3 Vol. 3 Issue 03
KEYWORDS: Photomasks, X-rays, Gold, Silicon, X-ray lithography, Electron beam lithography, Etching, Photoresist processing, Electroplating, Anisotropic etching

Proceedings Article | 30 December 2003 Paper
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Gold, Lithography, Ultraviolet radiation, X-rays, Photoresist materials, Photomasks, Plating, Beryllium, Photoresist processing, X-ray lithography

Proceedings Article | 16 June 2003 Paper
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Gold, Electron beam lithography, Polymethylmethacrylate, Etching, X-rays, Silicon, Photomasks, Mask making, Plating, X-ray lithography

Proceedings Article | 15 January 2003 Paper
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Gold, Electron beam lithography, Mirrors, Polymethylmethacrylate, X-rays, Silicon, Photomasks, Plating, Electroplating, X-ray lithography

Showing 5 of 6 publications
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