Linfang Xu
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11689, Integrated Optics: Devices, Materials, and Technologies XXV
KEYWORDS: Gas sensors, Silicon, Hollow waveguides, Semiconducting wafers, Sensors, Infrared technology, Deep reactive ion etching, Carbon dioxide, Wet etching, Waveguides

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

Proceedings Article | 5 March 2021 Presentation + Paper
Proc. SPIE. 11697, MOEMS and Miniaturized Systems XX
KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control

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