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Lingling Peng
at Changchun Univ of Science and Technology
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Publications (1)
Proceedings Article | 5 March 2015 Paper
Research on resistance properties of conductive layer materials of microchannel plate film dynode
Proceedings Volume 9521, 952110 (2015) https://doi.org/10.1117/12.2175993
KEYWORDS: Microchannel plates, Resistance, Silicon, Thin films, Atomic layer deposition, Low pressure chemical vapor deposition, Silicon films, Aluminum, Zinc oxide, Zinc
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