Ms. Lisa R. Rich Profile

Lisa R. Rich

at Hitchings Consulting

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 28 May 2004 Paper

Correction of 157-nm lens based on phase ring aberration extraction method

Jeff Meute, Georgia Rich, Will Conley, Bruce Smith, Lena Zavyalova, Julian Cashmore, Dominic Ashworth, James Webb, Lisa Rich

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.544256

KEYWORDS: Monochromatic aberrations, Wavefronts, Optics manufacturing, Manufacturing, Optical alignment, Birefringence, Phase measurement, Lithography, Reticles, Error analysis

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Proceedings Article | 30 July 2002 Paper

157-nm system test for high-NA lithographic lens systems

Horst Schreiber, Paul Dewa, K. Hanford, Robert Ligenza, Lisa Rich, Paul Tompkins

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474556

KEYWORDS: Wavefronts, Interferometers, Spatial coherence, Polarizers, Birefringence, Lithography, Polarization, Phase measurement, Oxygen, Interferometry

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Proceedings Article | 30 July 2002 Paper

Contamination and degradation of 157-nm stepper optical components: field experience at International SEMATECH

Jeff Meute, Georgia Rich, Stefan Hien, Kim Dean, Carolyn Gondran, Julian Cashmore, Dominic Ashworth, James Webb, Lisa Rich, Paul Dewa

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474621

KEYWORDS: Fiber optic illuminators, Contamination, Optical components, Objectives, Semiconducting wafers, Mirrors, Reticles, Lithography, Wafer-level optics, Failure analysis

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Proceedings Article | 6 March 2001 Paper

Semirigid mirrors with sparse actuators: thermal and structural performance capabilities

Gary Matthews, Lisa Rich, Calvin Abplanalp, Robert Egerman, Trevor Grover

Proceedings Volume 4198, (2001) https://doi.org/10.1117/12.417347

KEYWORDS: Mirrors, Actuators, Computer aided design, Error analysis, Space based lasers, Control systems, Composites, Space mirrors, Optical fabrication, Solid modeling

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