Ms. Lorea Oria Profile

Lorea Oria

Researcher at IMB-CNM CSIC

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Publications (3)

Proceedings Article | 26 March 2013 Paper

Block co-polymer multiple patterning directed self-assembly on PS-OH brush layer and AFM based nanolithography

Lorea Oria, Alaitz Ruiz de Luzuriaga, Juan Antonio Alduncín, Francesc Pérez-Murano

Proceedings Volume 8680, 868022 (2013) https://doi.org/10.1117/12.2014515

KEYWORDS: Atomic force microscopy, Polymers, Electron beam lithography, Atomic force microscopic nanolithography, Nanolithography, Lithography, Silicon, Plasma, Directed self assembly, Oxidation

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Proceedings Article | 21 March 2012 Paper

Block co-polymer guided self-assembly by surface chemical modification: optimization of multiple patterning process and pattern transfer

Lorea Oria, Alaitz Ruiz de Luzuriaga, Juan Alduncín, Francesc Pérez-Murano

Proceedings Volume 8323, 832327 (2012) https://doi.org/10.1117/12.916339

KEYWORDS: Polymers, Optical lithography, Lithography, Electron beam lithography, Oxygen, Plasma, Polymethylmethacrylate, Polymer thin films, Silicon, Chemical reactions

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Proceedings Article | 2 April 2011 Paper

Guided self-assembly of block-copolymer for CMOS technology: a comparative study between grapho-epitaxy and surface chemical modification

Lorea Oria, Alaitz Ruiz de Luzuriaga, Xavier Chevalier, Juan A. Alduncin, David Mecerreyes, Raluca Tiron, Stephanie Gaugiran, Francesc Perez-Murano

Proceedings Volume 7970, 79700P (2011) https://doi.org/10.1117/12.878486

KEYWORDS: Polymers, Lithography, Silicon, Oxygen, Polymethylmethacrylate, Line edge roughness, Plasma, Annealing, CMOS technology, Electron beam lithography

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