Dr. Lu Chen Profile

Dr. Lu Chen

at Applied Materials Inc

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Author

Publications (2)

Proceedings Article | 1 April 2009 Paper

Improved CD uniformity for chemical shrink patterning

Lu Chen, Nikolaos Bekiaris, Timothy Michaelson, Glen Mori

Proceedings Volume 7273, 72730F (2009) https://doi.org/10.1117/12.814359

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Lithography, Temperature metrology, Optical lithography, Resolution enhancement technologies, Industrial chemicals, Chemical reactions, Photoresist materials, Extreme ultraviolet lithography

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Proceedings Article | 15 April 2008 Paper

Wafer shape compensation at the track PEB for improved CD uniformity

Timothy Michaelson, Junyan Dai, Lu Chen, Hiram Cervera, Brian Lue, Harald Herchen, Kim Vellore, Nikolaos Bekiaris

Proceedings Volume 6923, 69233M (2008) https://doi.org/10.1117/12.772894

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Particles, Lithography, Scanners, Scanning electron microscopy, Wafer testing, Lutetium, Metrology, Silicon films

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