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Ludovic Laurent
at CEA-LETI
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Publications (1)
Proceedings Article | 19 September 2016 Presentation + Paper
Low noise torsional mechanical resonator for 12µm microbolometers
L. Laurent, J. J. Yon, J. S. Moulet, P. Imperinetti, L. Duraffourg
Proceedings Volume 9974, 997407 (2016) https://doi.org/10.1117/12.2237916
KEYWORDS: Resonators, Infrared sensors, Sensors, Temperature metrology, Infrared detection, Bolometers, Microbolometers, Absorption, Aluminum, Finite element methods
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