Dr. Lulu Lai
at Shanghai Huali Integrated Circuit Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 116112I (2021) https://doi.org/10.1117/12.2583545

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 116112J (2021) https://doi.org/10.1117/12.2583567
KEYWORDS: Fin field effect transistors, Signal processing, Optical alignment, Diffusion, Overlay metrology, Lithography, Integrated circuits, Etching

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