Mr. Luo Ma Profile

Luo Ma

at Hebei Univ

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Publications (2)

Proceedings Article | 18 November 2008 Paper

Deposition of nanocrystalline SiC films using helicon wave plasma enhanced chemical vapor deposition

Wanbing Lu, Wei Yu, Luo Ma, Liping Wu, Guangsheng Fu

Proceedings Volume 7135, 71353F (2008) https://doi.org/10.1117/12.803081

KEYWORDS: Silicon carbide, Plasma, Crystals, Hydrogen, Plasma enhanced chemical vapor deposition, FT-IR spectroscopy, Absorption, Thin films, Atomic force microscopy, Silicon

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Proceedings Article | 18 November 2008 Paper

Optical properties of protocrystalline silicon/amorphous SiC multilayer films

Guangsheng Fu, Luo Ma, Wanbing Lu, Zicai Zhang, Wei Yu

Proceedings Volume 7135, 713540 (2008) https://doi.org/10.1117/12.803517

KEYWORDS: Silicon, Multilayers, Silicon carbide, Absorption, Optical properties, Solar cells, Amorphous silicon, Raman spectroscopy, Raman scattering, Atomic force microscopy

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