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M. Lii
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Publications (1)
Proceedings Article | 4 December 2023 Presentation + Paper
A core engine to enable high quality multi-beam mask writers for 2nm node and beyond
Proceedings Volume PC12751, PC127510S (2023) https://doi.org/10.1117/12.2688300
KEYWORDS: Telecommunications, Optical proximity correction, Microelectromechanical systems, Optics manufacturing, Optical communications, Electrodes, Data communications, CMOS technology, CMOS devices
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