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Minah Choi
at KAIST
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Publications (1)
Proceedings Article | 19 February 2015 Paper
Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses
Young-Jin Kim, Minah Choi, Keunwoo Lee, Heesuk Jang, Jiyong Park, Seung-Woo Kim
Proceedings Volume 9449, 94493D (2015) https://doi.org/10.1117/12.2083260
KEYWORDS: Femtosecond phenomena, Interferometry, Interferometers, 3D metrology, Microelectronics, Fiber lasers, Spatial coherence, Precision measurement, Frequency combs, Mode locking
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