In the conventional methods to measure radial, axial and angular motions of spindles, complicated artifacts with relative
large volume (such as two balls linked with a cylinder) are required. Small volume artifact is favorable from the
viewpoint of the accurate and practical measurement of the spindle motion. This paper describes a concurrent
measurement of spindle radial, axial and angular motions using concentric circle grating and phase modulation
interferometers. In the measurement, the concentric circle grating with fine pitch is installed on top of the spindle of
interest. The grating is a reference artifact in the method. Three optical sensors are fixed over the concentric circle
grating, and observe the proper positions of the grating. The optical sensor consists of a frequency modulated laser diode
as a light source, and two interferometers. One interferometer observes an interference fringe between reflected light
form a fixed mirror and 0-th order diffraction light from the grating to measure the axial motion. Another interferometer
observes an interference fringe between ±2nd diffraction lights from the grating to measure the radial motion. Using
three optical sensors, three radial displacements and three axial displacements of the proper observed position of the
grating can be measured. From these measured displacements, radial, axial and angular motions of the spindle can be
calculated concurrently. In the paper, a measurement instrument, a novel fringe interpolation technique by sinusoidal
phase modulation and experimental results are discussed.
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