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Magalie Gregoire
at STMicroelectronics
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Publications (1)
Proceedings Article | 5 March 2021 Presentation + Paper
Si capacitive modulator integration in a 300mm silicon photonics platform using different annealing conditions
I. Charlet, L. Deniel, P. Acosta-Alba, Y. Désières, S. Guerber, S. Kerdilès, J. Lassarre, C. Perrot, C. Euvrard-Colnat, K. Ribaud, P. Grosse, M. Gregoire, K. Rovayaz, L. Mazet, S. Cremer, N. Vulliet, S. Monfray, S. Messaoudène, D. Marris-Morini, F. Boeuf
Proceedings Volume 11691, 116910R (2021) https://doi.org/10.1117/12.2577806
KEYWORDS: Modulators, Silicon, Annealing, Silicon photonics, Waveguides, Transmitters, Transceivers, Oxides, Optoelectronics
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