In this paper authors present two methods of determining the cantilever displacement sensitivity. In both cases the
cantilevers are examined in dynamic condition for cantilever vibrating with frequency range close to resonance
frequency. One of the method uses as measurement tool a white light interferometer, the another one uses the laser
interferometric vibrometer. For adequate comparing methods, obtained results refer to the same cantilever with
piezoresistive Wheatstone bridge. In this paper authors also present the fabrication process of piezoresistive cantilevers
with planar tip adapted for working in a shear force [1]. Additionally the piezoresistive circuit characterization by
impedance spectroscopy is presented. Finally the spring constant is determined basing on frequency response of the
cantilever measured from thermal noise density [2]. Basing on obtained results authors made a conclusion that both
methods can be successfully used for accurate characterization piazoresistive cantilevers work in a non-contact
resonance mode.
Increased interest in micro-and nano-electromechanical systems (MEMS and NEMS) entail the development of reliable measurement techniques for the basic parameters of the designed and manufactured devices. The proposed methodology should provide high resolution, wide frequency range and the possibility to investigate both mechanical and electrical parameters during inspection process. In this article authors present methods for manufacturing of electrostatic MEMS devices. Measurement techniques will be presented for specifying parameters such as resonant frequency, quality factor and sensitivity of the previously manufactured structures. Manufacturing techniques will be presented on the example of the micropusher structure, whereas measurement techniques will be presented on the example of the microgripper structure.
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