Dr. Mainul Hossain Profile

Dr. Mainul Hossain

Principal Engineer at GLOBALFOUNDRIES Inc

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Publications (2)

Proceedings Article | 24 March 2016 Paper

Hybrid enabled thin film metrology using XPS and optical

Alok Vaid, Givantha Iddawela, Sridhar Mahendrakar, Michael Lenahan, Mainul Hossain, Padraig Timoney, Abner Bello, Cornel Bozdog, Heath Pois, Wei Ti Lee, Mark Klare, Michael Kwan, Byung Cheol Kang, Paul Isbester, Matthew Sendelbach, Naren Yellai, Prasad Dasari, Tom Larson

Proceedings Volume 9778, 97780M (2016) https://doi.org/10.1117/12.2220299

KEYWORDS: Metrology, Thin films, X-rays, X-ray optics, Semiconducting wafers, Wafer-level optics, Process control, Ellipsometry, Diffractive optical elements, Deposition processes, Optical testing, Dielectrics, Optical properties

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Proceedings Article | 24 March 2016 Paper

XPS-XRF hybrid metrology enabling FDSOI process

Mainul Hossain, Ganesh Subramanian, Dina Triyoso, Jeremy Wahl, Timothy Mcardle, Alok Vaid, A. Bello, Wei Ti Lee, Mark Klare, Michael Kwan, Heath Pois, Ying Wang, Tom Larson

Proceedings Volume 9778, 97780N (2016) https://doi.org/10.1117/12.2219748

KEYWORDS: Metrology, Silicon, Optical metrology, Germanium, X-ray fluorescence spectroscopy, X-rays, Semiconducting wafers, Calibration, Sensors

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