Ms. Makiko Irie Profile

Makiko Irie

at Tokyo Ohka Kogyo Co Ltd

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Author

Publications (2)

Proceedings Article | 26 March 2008 Paper

Resist development to improve flare issue of EUV lithography

Makiko Irie, Takako Suzuki, Takeyoshi Mimura, Takeshi Iwai

Proceedings Volume 6923, 692310 (2008) https://doi.org/10.1117/12.771120

KEYWORDS: Photomasks, Diffusion, Polymers, Extreme ultraviolet lithography, Polymer thin films, Manufacturing, Semiconducting wafers, Lithography, Light sources, Optical lithography

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Proceedings Article | 29 March 2006 Paper

Changes of chemical nature of photoresists induced by various plasma treatments and their impact on LWR

Hiroichi Kawahira, Nobuyuki Matsuzawa, Eriko Matsui, Atsuhiro Ando, Kazi M. A. Salam, Masashi Yoshida, Yuko Yamaguchi, Katsuhisa Kugimiya, Tetsuya Tatsumi, Hiroyuki Nakano, Takeshi Iwai, Makiko Irie

Proceedings Volume 6153, 615319 (2006) https://doi.org/10.1117/12.656002

KEYWORDS: Line width roughness, Photoresist materials, Etching, Plasma, Plasma treatment, Chemical analysis, FT-IR spectroscopy, Polymers, Lithography, Semiconducting wafers

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