Mr. Makoto Fujimura Profile

Makoto Fujimura

at Zeon Corp

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Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper

Development on main chain scission resists for high-NA EUV lithography

Akihide Shirotori, Manabu Hoshino, Makoto Fujimura, Sin Fu Yeh , Hyo Seon Suh, Danilo De Simone, Geert Vandenberghe, Hideaki Sanuki

Proceedings Volume 12498, 1249807 (2023) https://doi.org/10.1117/12.2657506

KEYWORDS: Extreme ultraviolet lithography, Polymers, Lithography, Extreme ultraviolet, Scanners, Photoresist materials, Compact discs, Coating, Etching, Electron beam lithography

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