Dr. Makoto Suzuki
Senior Engineer at Hitachi High-Tech Corp
SPIE Involvement:
Author
Area of Expertise:
Scanning Electron Microscopy , Transmission Electron Microscopy , Electron beam optics , Electron-solid interaction , Electron detectors
Publications (15)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

Proceedings Article | 30 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Image processing, Error analysis, Inspection, Scanning electron microscopy, Extreme ultraviolet, Artificial intelligence, Critical dimension metrology, Semiconducting wafers, Stochastic processes

SPIE Journal Paper | 6 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Proceedings Article | 29 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Metrology, Image processing, Error analysis, Scanning electron microscopy, Process control, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Stochastic processes

Showing 5 of 15 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top