Dr. Marco Feldmann Profile

Dr. Marco Feldmann

at Technische Univ Braunschweig

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Publications (3)

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Proceedings Article | 17 May 2013 Paper

Electromagnetic microactuators

S. Büttgenbach, A. Al-Halhouli, M. Feldmann, V. Seidemann, A. Waldschik

Proceedings Volume 8763, 87630R (2013) https://doi.org/10.1117/12.2018391

KEYWORDS: Magnetism, Microactuators, Electromagnetism, Polymers, Microfluidics, Actuators, Ultraviolet radiation, Lithography, Phase modulation, Particles

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High precision microactuators have become key elements for many applications of MEMS, for example for positioning and handling systems as well as for microfluidic devices. Electromagnetic microactuators exhibit considerable benefits such as high forces, large deflections, low input impedances and thus, the involvement of only low voltages. Most of the magnetic microactuators developed so far are based on the variable reluctance principle and use soft magnetic materials. Since the driving force of such actuators is proportional to their volume, they require structures with rather great heights and aspect ratios. Therefore, the development of new photo resists, which allow UV exposure of thick layers of resist, has been essential for the advancement of variable reluctance microactuators. On the other hand, hard magnetic materials have the potential for larger forces and larger deflections. Accordingly, polymer magnets, in which micro particles of hard magnetic material are suspended in a polymer matrix, have been used to fabricate permanent magnet microactuators. In this paper we give an overview of sophisticated electromagnetic microactuators which have been developed in our laboratory in the framework of the Collaborative Research Center “Design and Manufacturing of Active Microsystems”. In particular, concept, fabrication and test of variable reluctance micro stepper motors, of permanent magnet synchronous micromotors and of microactuators based on the Lorentz force principle will be described. Special emphasis will be given to applications in lab-on-chip systems.

Proceedings Article | 27 December 2007 Paper

Novel electromagnetic micropump

M. Feldmann, S. Demming, C. Lesche, S. Büttgenbach

Proceedings Volume 6799, 67990T (2007) https://doi.org/10.1117/12.759486

KEYWORDS: Microfluidics, Actuators, Polymers, Magnetism, Laser induced plasma spectroscopy, Glasses, Plasma, Lithography, Electromagnetism, Particles

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The mergence of partial aspects and functional components of micro actuators and micro fluidic technology allows the development of complex micro systems, which are more and more interesting for MEMS application, especially for BioMEMS. This enormous potential is shown in this article showing the realization of an electro magnetic micro pump. The basic build-up consists of a polymer magnet integrated into a pump chamber of a fluidic PDMS device, which is located above a double layer micro coil. By applying a current, the polymer magnet performs a bidirectional movement, which results in a pumping effect by the two arranged passive check valves being perpendicularly arranged to the flow channels. The valve membrane is flexible and opens the channel towards the flow direction. The advantage of this configuration is that leakage can be avoided by the special geometrical configuration of the fluid chamber and the valves. The fabrication process includes UV depth lithography using AZ9260, electroforming of copper for the double layer spiral coil and Epon SU-8 for insulation, embedding and manufacturing of the valve seat. Furthermore, the fluidic devices are realized by replica molding of PDMS using a multilayer SU-8 master. Furthermore, a new technology for realizing micro polymer magnets was optimized and deployed. Using these fabrication processes, a magnetic micro actuator has already been developed based on the movable plunger principle, which forms the basic set-up of the micro pump. This actuator is monolithically fabricated and successfully tested. In addition, the fluidic system of the micro pump was successfully fabricated and tested. In order to connect the valve seats based on SU-8 to the PDMS fluidic chamber and the valve lips, a special bonding process was developed. The combination of the fluidic system with the electromagnetic part is currently under investigation. The dimension of the micro pump is about 10 × 6 × 3 mm.

Proceedings Article | 21 December 2007 Paper

Electromagnetic micro-actuators, micro-motors, and micro-robots

M. Feldmann, A. Waldschik, S. Büttgenbach

Proceedings Volume 6798, 679811 (2007) https://doi.org/10.1117/12.759482

KEYWORDS: Actuators, Robots, Lithography, Electroplating, Polymers, Magnetism, Electromagnetism, Photography, Composites, Copper

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Due to the development of new technologies, more and more complex MEMS applications can be realized. Especially electromagnetic micro actuators have reached a growing interest in micro technology in addition to commercial applications during the last years. Their basic construction exists of electric conductors and coil systems as well as of soft-magnetic and/or hard-magnetic materials that were fabricated in additive technology via UV-depth lithography and electroplating. For UV-depth lithography, photo resists like Epon SU-8, AZ9260, Intervia-3D-N and CAR44 were applied and optimized. Layer thickness up to 1 mm and aspect ratios over 60 were achieved. Special micro composites were developed. This allowed the fabrication of micro magnets with arbitrary shape and properties, revealing a complete compatibility to existing process chains. With these potential technologies, several complex 3-D micro actuators like micro motors and micro robots were developed and successfully tested. These developments include in detail: linear and rotatory reluctance micro stepper motors with compensated attraction force as well as a special "Lorentz force actuator", which was used for micro robots and micro motors. The micro robots were deployed for assembling and for micro-/nano positioning. Furthermore "plunger coil actuators" were realized based on a voice coil principle, which were used e.g. for a micro switch or a micro mirror. Moreover, rotatory synchronous motors were developed and successfully tested. All these devices have been realized by outstanding fabrication technologies and can be used for a wide range of applications.

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