Mr. Marco Perske Profile

Marco Perske

Senior Engineer at optiX fab GmbH

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Author

Publications (6)

Proceedings Article | 30 April 2023 Presentation

25 years of EUV multilayer optics development at optiX fab and Fraunhofer IOF

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Philipp Naujok, Klara Stallhofer, Tina Seifert, Annika Schmitt

Proceedings Volume PC12494, PC124940A (2023) https://doi.org/10.1117/12.2664589

KEYWORDS: Extreme ultraviolet, Multilayers, EUV optics, Semiconductors, Semiconducting wafers, Printing, Photons, Industry, Extreme ultraviolet lithography, Coating

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Proceedings Article | 16 March 2015 Paper

Sub-aperture EUV collector with dual-wavelength spectral purity filter

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Uwe Zeitner, Robert Leitel, Hans-Christoph Eckstein, Philipp Schleicher, Sven Schröder, Marcus Trost, Stefan Risse, Ralf Steinkopf, Frank Scholze, Christian Laubis

Proceedings Volume 9422, 94220E (2015) https://doi.org/10.1117/12.2175666

KEYWORDS: Extreme ultraviolet, Reflectivity, Mirrors, Optical filters, Binary data, Carbon dioxide lasers, Diffraction, Infrared radiation, Multilayers, Spherical lenses

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Proceedings Article | 1 April 2013 Paper

Lifetime and refurbishment of multilayer LPP collector mirrors

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Sergiy Yulin, Norbert Kaiser, Andreas Tünnermann, Norbert Böwering, Alex Ershov, Silvia de Dea, Kay Hoffmann, Bruno La Fontaine, Igor Fomenkov, David Brandt

Proceedings Volume 8679, 86790C (2013) https://doi.org/10.1117/12.2015492

KEYWORDS: Mirrors, Reflectivity, Multilayers, Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Optical coatings, Light sources, EUV optics, Tin

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Proceedings Article | 23 March 2012 Paper

Optical performance of LPP multilayer collector mirrors

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Sergiy Yulin, Marcus Trost, Sven Schröder, Angela Duparré, Norbert Kaiser, Andreas Tünnermann, Norbert Böwering, Alex Ershov, Kay Hoffmann, Bruno La Fontaine, Kevin Cummings

Proceedings Volume 8322, 832217 (2012) https://doi.org/10.1117/12.919735

KEYWORDS: Mirrors, Extreme ultraviolet, Coating, Reflectivity, Multilayers, EUV optics, Light sources, Plasma, Extreme ultraviolet lithography, Light scattering

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Proceedings Article | 25 September 2008 Paper

High performance EUV multilayer optics

Norbert Kaiser, Sergiy Yulin, Marco Perske, Torsten Feigl

Proceedings Volume 7101, 71010Z (2008) https://doi.org/10.1117/12.796150

KEYWORDS: Multilayers, Reflectivity, Mirrors, Extreme ultraviolet, Extreme ultraviolet lithography, Interfaces, EUV optics, Carbon, Annealing, Thermography

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Proceedings Article | 3 September 2008 Paper

Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Torsten Feigl, Sergiy Yulin, Marco Perske, Hagen Pauer, Mark Schürmann, Norbert Kaiser, Norbert Böwering, Oleg Khodykin, Igor Fomenkov, David Brandt

Proceedings Volume 7077, 70771W (2008) https://doi.org/10.1117/12.802322

KEYWORDS: Reflectivity, Mirrors, Coating, Extreme ultraviolet, Multilayers, Silicon, Molybdenum, Annealing, Interfaces, Plasma

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Showing 5 of 6 publications

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