Marek Schmidt
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 March 2015 Paper
Proc. SPIE. 9435, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015
KEYWORDS: Polishing, Ferroelectric materials, Sensors, Metals, Ceramics, Composites, Aluminum, Adhesives, Surface finishing, Chemical mechanical planarization

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