Mr. Maria J. Cadena Profile

Maria J. Cadena

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 August 2024 Paper

Tod Robinson, Maria Cadena

Proceedings Volume 13177, 131770R (2024) https://doi.org/10.1117/12.3032093

KEYWORDS: Extreme ultraviolet, Atomic force microscopy, Photomasks, Reflectivity, Critical dimension metrology, Contamination

Proceedings Article | 23 August 2021 Paper

Maria Cadena, Tod Robinson, Marty Klos

Proceedings Volume 11908, 1190803 (2021) https://doi.org/10.1117/12.2601389

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Keywords/Phrases