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Maria Claus
at Fraunhofer-ISIT
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Publications (1)
Proceedings Article | 28 February 2020 Presentation + Paper
A triple-wafer-bonded AlScN driven quasi-static MEMS mirror with high linearity and large tilt angles
S. Gu-Stoppel, T. Lisec, M. Claus, N. Funck, S. Fichtner, S. Schröder, B. Wagner, F. Lofink
Proceedings Volume 11293, 1129304 (2020) https://doi.org/10.1117/12.2542800
KEYWORDS: Mirrors, Actuators, Semiconducting wafers, Microelectromechanical systems, Deep reactive ion etching, Wafer bonding, Electrodes, Optical lithography, Dielectrics, Piezoelectric thin film actuators
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