Dr. Mariko Kajima Profile

Dr. Mariko Kajima

at AIST

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 August 2023 Presentation + Paper

Calibration system for photomask roundness based on a precision rotary table

Mariko Kajima, Kentaro Sugawara, Yasuaki Hori, Tsukasa Watanabe

Proceedings Volume 12619, 1261909 (2023) https://doi.org/10.1117/12.2673712

KEYWORDS: Photomasks, Calibration, Microscopes, Interferometers, Edge detection, Ultraviolet radiation, Standards development, Imaging systems, CCD image sensors, Beam diameter

Read Abstract +

Proceedings Article | 18 June 2007 Paper

Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system

Mariko Kajima, Hirokazu Matsumoto

Proceedings Volume 6616, 66160G (2007) https://doi.org/10.1117/12.726247

KEYWORDS: Interferometers, Signal detection, Calibration, Helium neon lasers, Computer programming, Semiconductor lasers, Laser stabilization, Modulation, Femtosecond frequency combs, Femtosecond phenomena

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years