Dr. Marina Mariano Juste Profile

Dr. Marina Mariano Juste

at imec

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 17 October 2019 Presentation

CNT EUV pellicle: balancing options (Conference Presentation)

Emily Gallagher, Ivan Pollentier, Marina Timmermans, Marina Mariano Juste, Cedric Huyghebaert

Proceedings Volume 11148, 111480Z (2019) https://doi.org/10.1117/12.2539262

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Particles, Semiconducting wafers, Wafer inspection, Photomasks, Scanners, Tolerancing

Read Abstract +

SPIE Journal Paper | 13 March 2019

Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

Iacopo Mochi, Marina Timmermans, Emily Gallagher, Marina Mariano, Ivan Pollentier, Rajeev Rajendran, Patrick Helfenstein, Sara Fernandez, Dimitrios Kazazis, Yasin Ekinci

JM3, Vol. 18, Issue 01, 014002, (March 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.014002

KEYWORDS: Pellicles, Extreme ultraviolet, Scattering, Reticles, Diffraction, Image quality, Inspection, Coating, Photomasks, Carbon nanotubes

Read Abstract +

SPIE Journal Paper | 27 November 2018

Free-standing carbon nanotube films for extreme ultraviolet pellicle application

Marina Y. Timmermans, Marina Mariano, Ivan Pollentier, Olivier Richard, Cedric Huyghebaert, Emily Gallagher

JM3, Vol. 17, Issue 04, 043504, (November 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.043504

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Particles, Carbon nanotubes, Coating, Scanners, Hydrogen, Inspection, Photomasks

Read Abstract +

Proceedings Article | 3 October 2018 Presentation + Paper

Experimental evaluation of the impact of EUV pellicles on reticle imaging

Iacopo Mochi, Marina Timmermans, Emily Gallagher, Marina Mariano Juste, Ivan Pollentier, Rajendran Rajeev, Patrick Helfenstein, Sara Fernandez, Dimitrios Kazazis, Yasin Ekinci

Proceedings Volume 10810, 108100Y (2018) https://doi.org/10.1117/12.2502480

KEYWORDS: Pellicles, Extreme ultraviolet, Scattering, Diffraction, Reticles, Image quality, Inspection, Coating

Read Abstract +

Proceedings Article | 23 April 2018 Presentation + Paper

CNTs in the context of EUV pellicle history

Emily Gallagher, Marina Timmermans, Ivan Pollentier, Jae Uk Lee, Marina Mariano, Christoph Adelmann, Cedric Huyghebaert, Frank Scholze, Christian Laubis

Proceedings Volume 10583, 105831E (2018) https://doi.org/10.1117/12.2297710

KEYWORDS: Pellicles, Extreme ultraviolet, Particles, Extreme ultraviolet lithography, Semiconducting wafers, Photomasks, Scanners, Scattering, Silicon, Hydrogen

Read Abstract +

SPIE Journal Paper | 16 February 2015 Open Access

Semi-transparent polymer solar cells

Pablo Romero-Gómez, Francesco Pastorelli, Paola Mantilla-Pérez, Marina Mariano, Alberto Martínez-Otero, Xavier Elias, Rafael Betancur, Jordi Martorell

JPE, Vol. 5, Issue 01, 057212, (February 2015) https://doi.org/10.1117/12.10.1117/1.JPE.5.057212

KEYWORDS: Electrodes, Polymers, Near infrared, Solar cells, Photonic crystals, Opacity, Silver, Organic photovoltaics, Visible radiation, External quantum efficiency

Read Abstract +

DOWNLOAD PAPER

Showing 5 of 6 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years