We report on the development of commercially fabricated multi-chroic antenna coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave Background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next generation CMB experiments require a new approach in detector wafer production to increase fabrication throughput.
We describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC Inc.) to fabricate detector arrays for CMB application. We have successfully fabricated dual-polarization, dichroic sinuous antenna-coupled TES detector arrays on 150 mm diameter wafers. We report on our recent progress on process optimization to achieve target detector performance such as superconducting transition temperature of a sensor, impedance of sensors, band pass placement, and optical efficiency. We will also report on development of orthomode transducer coupled horn detector fabrication at SeeQC Inc.
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